Mu ntchito yopanga zinthu molondola komanso kafukufuku wa sayansi, kusalala kwa nsanja zolondola za granite ndi chizindikiro chofunikira kwambiri chotsimikizira kulondola kwa zida. Izi ndi chiyambi chatsatanetsatane cha njira zingapo zodziwira zinthu zomwe zimagwiritsidwa ntchito komanso njira zomwe zimagwirira ntchito.
I. Njira yodziwira laser interferometer
Chida choyezera kuwala cha laser ndicho chida chomwe chimagwiritsidwa ntchito kwambiri pozindikira kusalala kolondola kwambiri. Tengani chitsanzo cha chipangizo choyezera kuwala cha ZYGO GPI XP, mphamvu yake imatha kufika 0.1nm. Mukachita izi, choyamba gwirizanitsani gwero la kuwala kwa chipangizocho ndi nsanja ndikugawa pamwamba pa nsanjayo m'malo a gridi ya 50mm × 50mm. Pambuyo pake, deta ya fringe yosokoneza inasonkhanitsidwa mfundo ndi mfundo, ndipo detayo inayikidwa ndikusanthulidwa pogwiritsa ntchito Zernike polynomial kuti mupeze cholakwika cha kusalala. Njirayi imagwira ntchito pamapulatifomu olondola kwambiri ndipo imatha kuzindikira zolakwika za kusalala kwa ≤0.5μm/m². Imagwiritsidwa ntchito kwambiri pozindikira makina ojambulira zithunzi ndi nsanja zapamwamba zoyezera zitatu.
II. Njira ya Electronic Level Array
Kuzindikira magulu amagetsi ndi kosavuta kugwiritsa ntchito komanso kogwira mtima kwambiri. Mlingo wamagetsi wa TESA A2 (wokhala ndi resolution ya 0.01μm/m) unasankhidwa ndikukonzedwa mu gulu la 9×9 motsatira X/Y axis ya nsanja. Mwa kusonkhanitsa deta yopendekera ya gawo lililonse kenako ndikugwiritsa ntchito njira ya least square powerengera, mtengo wa flatness ukhoza kupezeka molondola. Njirayi imatha kuzindikira bwino momwe malo olumikizirana komanso olumikizirana a nsanjayo alili. Mwachitsanzo, kusinthasintha kwa 0.2μm mkati mwa 50mm kungadziwikenso, komwe ndikoyenera kuzindikirika mwachangu popanga zinthu zambiri.
III. Njira ya Optical Flat Crystal
Njira yowunikira ya kristalo yathyathyathya ndiyoyenera kuzindikira malo ang'onoang'ono. Lumikizani kristalo yathyathyathya yowunikira bwino pamwamba kuti muyesedwe pa pulatifomu ndikuwona malekezero osakanikirana omwe amapangidwa pakati pawo pansi pa kuunikira kwa gwero la kuwala la monochromatic (monga nyali ya sodium). Ngati mizereyo ndi mizere yolunjika yofanana, imasonyeza kusalala bwino. Ngati mizere yokhota ikuwoneka, werengani cholakwika cha kusalala kutengera kuchuluka kwa kupotoka kwa mizere. Mzere uliwonse wokhota umayimira kusiyana kwa kutalika kwa 0.316μm, ndipo deta ya kusalala ingapezeke mwa kusintha kosavuta.
Makina anayi. Njira yowunikira makina oyezera atatu
Makina oyezera atatu amatha kuyeza molondola kwambiri m'malo atatu. Ikani nsanja ya granite patebulo logwirira ntchito la makina oyezera ndikugwiritsa ntchito probe kuti musonkhanitse deta kuchokera ku malo angapo oyezera pamwamba pa nsanja. Makina oyezera amayendetsa ndikusanthula deta iyi kuti apange lipoti la kusalala kwa nsanja. Njirayi singathe kungozindikira kusalala, komanso kupeza magawo ena a geometric a nsanja nthawi imodzi, ndipo ndi yoyenera kuzindikira nsanja zazikulu za granite.
Kudziwa bwino njira zopezera zinthuzi kungakuthandizeni kuwona bwino momwe nsanja yolondola ya granite ilili yosalala komanso kupereka chitsimikizo chodalirika cha magwiridwe antchito okhazikika a zida zolondola.
Nthawi yotumizira: Meyi-29-2025