Ma Granite Air Bearings: Momwe Amagwirira Ntchito ndi Chifukwa Chake Granite Ndi Chitsogozo Chabwino Kwambiri

Ma bearing a mpweya amakwaniritsa zomwe bearing yosakhudzana nayo ingathe: kuyenda popanda kuwonongeka, popanda kutsetsereka ndi kupukutidwa, pamlingo wowongoka wa sub-micron. Koma bearing ya mpweya imakhala yabwino pokhapokha pamwamba pake. Nkhaniyi ikufotokoza za fizikiki ya mafilimu a mpweya, chifukwa chake granite yachilengedwe yokhala ndi tinthu tating'onoting'ono ndi chinthu choyenera kugwirizanirana, kulondola kwa pamwamba komwe msewu wotsogolera umafuna, komanso komwe magawo a bearing a mpweya wa granite amapereka phindu lalikulu - kuyambira pa nsanja zamagalimoto mpaka makina owunikira owonera.

1. Momwe Maberiyani a Mpweya Amagwirira Ntchito: Kuyenda pa Filimu ya Microscopic ya Mpweya

Chotengera cha mpweya chimathandizira katundu wake pa filimu yopyapyala yopanikizika, yomwe nthawi zambiri imakhala yokhuthala 3–15 µm. Mfundo ziwiri zoyendetsera magetsi zimayang'ana kwambiri:

• Kubwezera ndalama za orifice.Mpweya umadutsa m'mabowo akuluakulu kupita m'thumba kapena m'mphako wosaya; kuthamanga kumadzisintha kokha pamene mpata ukusintha. Ndi wosavuta komanso wolimba, koma mphamvu yake ndi yocheperako ndipo filimuyo imazindikira zolakwika za pamwamba.
• Kubwezera kwa mabowo.Mpweya umatuluka magazi mofanana kudzera mu chinthu chokhala ndi mapokoso (nthawi zambiri kaboni), zomwe zimapangitsa kuti filimuyo ikhale yokhazikika komanso yolekerera kupendekeka komanso yonyowa kwambiri.

Mulimonsemo, fizikisi yolamulira ndi yofanana: kuuma kwa filimu kumadalira kufanana kwa malo otsetsereka. Ngati pamwamba pa msewu pali kugwedezeka kofanana ndi makulidwe a filimu, sitejiyo imakumana ndi kusintha kwa kuthamanga kwa mpweya — kooneka ngati cholakwika chowongoka, kugwedezeka, kapena choipa kwambiri, nyundo ya pneumatic (kudzigwedeza yokha).Njira yoyendetsera galimoto, osati chowongolera, ndiyo imakhazikitsa denga labwino la makinawo.

2. Chifukwa Chake Granite Ndi Chitsogozo Chabwino Kwambiri

Nthawi zina mainjiniya amafunsa chifukwa chake magawo oyendetsera mpweya amathamanga kwambiri pa granite osati pa zitsulo kapena ceramic rails. Zifukwa zake ndi zakuthupi-fiziki, osati miyambo:

• Kapangidwe ka tirigu wabwino, wofanana.Granite wakuda wa Igneous umalimba chifukwa cha kusungunuka kamodzi; palibe kugawanika kwa dendritic, inclusions kapena matrix yofewa monga momwe zilili mu chitsulo chopangidwa ndi chitsulo. Kulumikizana kumasonyeza malo ofanana, kotero kuti mpweya umakhala wofanana paulendo wonse - chinthu chofunikira kwambiri kuti filimu ikhale yolimba.
• Kuwonjezeka kwa kutentha kochepa (≈5–8 µm/m·°C).Mipata ya mpweya ndi ma microns ochepa chabe; kusintha kwa kutentha kwa theka la digiri kumatha kusuntha njanji yachitsulo kuposa mipata ya mpweya. Kukhazikika kwa granite kumasunga mawonekedwe a filimuyo mkati mwa masana ndi usiku.
• Palibe dzimbiri, palibe mafuta.Granite yopanda kanthu siifunikira zokutira kapena mafuta — yofunika kwambiri m'zipinda zoyera, komwe kutulutsa mpweya ndi kupanga tinthu tating'onoting'ono sikuvomerezeka.
• Kuchepetsa kwambiri kutentha.Kuchepetsa kwamkati kwa Granite kumaletsa kufalikira kwa kugwedezeka kuchokera pansi ndi ma drive, zomwe zimapangitsa kuti siteji yoyandama isayende bwino.
• Yosavuta kusinthasintha mpaka kufika pa micron-level pamwamba pa mamita.Mizere yayitali ya granite imatha kulumikizidwa ndi manja ndikutsimikiziridwa kuti ndi maikuloni ochepa pa mamita angapo - chinthu chomwe makina okha sangachikwaniritse.

3. Kodi Chitsogozo cha Mpweya Choyendera Mpweya Chimafunika Kulondola Pamwamba Pati?

Kufotokozera kumadalira mtundu wa chimbalangondo ndi khalidwe la kayendedwe ka cholinga, koma zofunikira zachizolowezi kuti chikhale cholondolampweya wozungulira wa granitedongosolo ndi:

Kutsimikizira sikusiyana ndi manambala awa: kuyeza kulunjika pamwamba pa njanji ya 2 m yokhala ndi kusatsimikizika kwa sub-micron kumafuna milingo yamagetsi, ma autocollimators kapena laser interferometry m'chipinda cholamulidwa ndi kutentha. Ichi ndichifukwa chake luso loyezera la wogulitsa njira yoyendetsera galimoto ndi lofunika kwambiri monga momwe mabenchi awo olumikizirana amagwirira ntchito - timafotokoza njira yathu mukuyang'anira ndi kuwerengera granitenjira.

4. Mapulogalamu Odziwika

• Mapulatifomu a injini zolunjika.Ma mota opanda chitsulo amapereka mphamvu yosalala popanda kutsekeka; kuphatikiza ndi njira zoyendetsera mpweya za granite, magawo amafika pamlingo wowongoka wa sub-micron pa liwiro la 1-2 m/s - kapangidwe kabwino ka kuyang'anira wafer ndi laser scanning.
• Magawo olondola a XY.Magawo ozungulira mpweya kapena ozungulira omwe ali pa maziko a granite amakwaniritsa kubwerezabwereza kwa nanometer pa lithography-metrology yoyandikana nayo, makadi ofufuzira ndi kuwunika kowonetsera.
• Machitidwe owunikira maso.Makina a sensa a Confocal, interferometric ndi chromatic amafunika kusuntha kosagwedezeka komanso kosawonongeka; filimu yosakhudzana ndi kukhudza siiwonjezera tinthu tating'onoting'ono kapena hysteresis.
• Ma labotale oyerekeza zinthu zambiri ndi ma metrology.Magalimoto onyamula mpweya pa njanji za granite amagwira ntchito komwe ukhondo ndi ungwiro wa mawonekedwe ndizofunikira.

Muzochitika zonsezi, granite imagwira ntchito ziwiri nthawi imodzi: maziko a kapangidwe kake ndi njira yolondola. Kuphatikiza zonse ziwiri mu chinthu chimodzi - njira imodzi yolumikizirana, khalidwe limodzi la kutentha, chitsimikizo chimodzi - kumachotsa mawonekedwe omwe angayambitse cholakwika. Tsatanetsatane wowonjezera wa ntchito ukupezeka mu yathuzida za semiconductormayankho.

5. Zolemba Zopangidwa Musanafotokoze

1. Tanthauzirani ulendo, katundu wolemera komanso pakati pa mphamvu yokoka— kulimba kwa filimu ndi kunyamula katundu woyambirira kumayikidwa mozungulira iwo.
2. Tchulani mtundu wa mpweya— mpweya wouma nthawi zambiri umakhala woyera komanso wosefedwa mpaka 0.01 µm; filimuyo imakhala yoyera ngati madzi opezeka.
3. Sankhani nthawi yoyezera— ndani ali ndi udindo wolunjika: wopanga ma bearing, wopanga maziko, kapena makina osonkhanitsidwa?
4. Konzani malo okhala— 20 ± 0.5 °C ndi maziko osasunthika omwe amasunga mawonekedwe otsimikizika.
5. Pemphani lipoti loyendera limodzi ndi gawolo— anayeza kuongoka/kusalala ndi kuzindikira kwa chipangizo ndi kutsata, osati chilembo chokha.

Mapeto

Ma bearing a mpweya ndi granite ndi ofanana: bearing imapereka kayendedwe kopanda kukangana, ndipo granite imapereka malo okhazikika, opanda kutentha, komanso opanda tinthu tating'onoting'ono tomwe timapangitsa filimuyo kugwira ntchito. Zonse ziwiri zikapangidwa ndi kutsimikiziridwa pamodzi, zotsatira zake zimakhala khalidwe la kayendedwe lomwe makina olumikizirana sangathe kufikako.

Mukupanga gawo loyendera mpweya kapena nsanja yoyendera? Titumizireni mtunda woyendera, katundu wonyamula, kulunjika kofunikira ndi zojambula zolumikizirana — ZHHIMG® idzapanga ndikutsimikizira zigawo za granite guideway za dongosolo lanu, ndi lipoti lowunikira lomwe lingatsatidwe.