Pakupanga zinthu zopangidwa ndi semiconductor, makina ojambulira zithunzi ndi chipangizo chofunikira kwambiri chomwe chimazindikira kulondola kwa tchipisi, ndipo maziko a granite, okhala ndi mawonekedwe osiyanasiyana, akhala gawo lofunika kwambiri pa makina ojambulira zithunzi.
Kukhazikika kwa kutentha: "Chishango" cholimbana ndi kusintha kwa kutentha
Makina ojambulira zithunzi akamagwira ntchito, amapanga kutentha kwakukulu. Ngakhale kusinthasintha kwa kutentha kwa 0.1℃ kokha kungayambitse kusintha kwa zida ndikukhudza kulondola kwa photolithography. Kuchuluka kwa kutentha kwa granite kumakhala kochepa kwambiri, ndi 4-8 × 10⁻⁶/℃ yokha, yomwe ndi pafupifupi 1/3 ya chitsulo ndi 1/5 ya aluminiyamu. Izi zimathandiza maziko a granite kukhalabe olimba pamene makina ojambulira zithunzi akugwira ntchito kwa nthawi yayitali kapena kutentha kwa chilengedwe kukasintha, kuonetsetsa kuti zigawo zowunikira ndi zomangamanga zamakina zikuyikidwa bwino.
Kuchita bwino kwambiri polimbana ndi kugwedezeka: "Siponji" yomwe imatenga kugwedezeka
Mu fakitale ya semiconductor, kugwiritsa ntchito zida zozungulira komanso kuyenda kwa anthu kungapangitse kugwedezeka. Granite ili ndi kachulukidwe kakakulu komanso kapangidwe kolimba, ndipo ili ndi mphamvu zabwino kwambiri zonyowetsa, yokhala ndi chiŵerengero cha kunyowetsa cha 2 mpaka 5 kuposa zitsulo. Pamene kugwedezeka kwakunja kumatumizidwa ku maziko a granite, kukangana pakati pa makhiristo amchere amkati kumasintha mphamvu yonyowetsa kukhala mphamvu yotentha yotayira, zomwe zingachepetse kwambiri kugwedezeka kwakanthawi kochepa, zomwe zimalola makina onyowetsa kuti abwezeretse msanga kukhazikika ndikupewa kusokoneza kapena kusokoneza mawonekedwe a photolithography chifukwa cha kugwedezeka.
Kukhazikika kwa mankhwala: "Woteteza" Malo Oyera
Mkati mwa makina ojambulira zithunzi mumakumana ndi zinthu zosiyanasiyana za mankhwala, ndipo zinthu zachitsulo wamba zimatha kuwononga kapena kutulutsa tinthu tating'onoting'ono. Granite imapangidwa ndi mchere monga quartz ndi feldspar. Ili ndi mphamvu zokhazikika za mankhwala komanso kukana dzimbiri mwamphamvu. Ikalowetsedwa mu asidi ndi alkali, dzimbiri pamwamba pake limakhala laling'ono kwambiri. Pakadali pano, kapangidwe kake kolimba sikapanga zinyalala kapena fumbi, zomwe zimakwaniritsa zofunikira za miyezo yapamwamba kwambiri yoyeretsera komanso kuchepetsa chiopsezo cha kuipitsidwa kwa wafer.
Kusinthasintha kwa kukonza: "Zinthu zabwino kwambiri" zopangira miyeso yolondola
Zigawo zazikulu za makina ojambulira zithunzi ziyenera kuyikidwa pamalo olondola kwambiri. Kapangidwe ka mkati mwa granite ndi kofanana ndipo n'kosavuta kukonzedwa bwino kwambiri kudzera mu kupukuta, kupukuta ndi njira zina. Kusalala kwake kumatha kufika ≤0.5μm/m, ndipo kukhwima kwa pamwamba pa Ra ndi ≤0.05μm, zomwe zimapangitsa kuti pakhale maziko olondola oyika zinthu monga magalasi owonera.
Moyo wautali komanso wopanda kukonza: "Zida zakuthwa" zochepetsera ndalama
Poyerekeza ndi zipangizo zachitsulo zomwe zimatopa komanso kusweka chifukwa chogwiritsa ntchito nthawi yayitali, granite simaphwanyika kapena kusweka pulasitiki ikagwiritsidwa ntchito bwino, ndipo siifunikira kukonzedwa pamwamba, motero imapewa chiopsezo cha kupukuta ndi kuipitsidwa. Mu ntchito yeniyeni, pambuyo pogwiritsidwa ntchito kwa zaka zambiri, zizindikiro zazikulu za ntchito ya granite zimatha kukhalabe zokhazikika, zomwe zimachepetsa ndalama zogwirira ntchito ndi kukonza zidazo.
Kuyambira kukhazikika kwa kutentha, kukana kugwedezeka kwa mankhwala osagwira ntchito, makhalidwe osiyanasiyana a maziko a granite amakwaniritsa bwino zofunikira za makina ojambulira zithunzi. Pamene njira yopangira ma chip ikupitilira kukula kuti ikhale yolondola kwambiri, maziko a granite apitilizabe kugwira ntchito yosasinthika m'munda wopanga ma semiconductor.
Nthawi yotumizira: Meyi-20-2025