Ndi mbali ziti za dongosolo losamutsira wafer zomwe zipangizo za granite zimagwiritsidwa ntchito?

Zipangizo za granite zimagwiritsidwa ntchito kwambiri mumakampani opanga zinthu za semiconductor chifukwa cha makhalidwe awo abwino kwambiri, monga kukhazikika kwambiri, kutentha kochepa, komanso kukana dzimbiri. Zinthu zimenezi zimapangitsa granite kukhala chinthu chabwino kwambiri chomangira zinthu zolondola kwambiri mu dongosolo losamutsa wafer.

Mu njira yopangira ma semiconductor, njira yosinthira ma wafer imagwira ntchito yofunika kwambiri ponyamula ma wafer m'magawo osiyanasiyana a njira yopangira. Kulondola ndi kulondola ndizofunikira kwambiri pa njirazi chifukwa ngakhale kusintha pang'ono kungawononge njira yonse. Chifukwa chake, zigawo zomwe zili mu njira yosinthira ma wafer ziyenera kupangidwa kuchokera ku zipangizo zapamwamba, ndipo granite ikukwaniritsa zofunikirazo.

Mbali zina za dongosolo losamutsira wafer zomwe zimapangidwa kuchokera ku zinthu za granite ndi izi:

1. Tebulo la Vacuum Chuck

Tebulo la vacuum chuck limagwiritsidwa ntchito posungira wafer panthawi yogwiritsira ntchito, ndipo liyenera kukhala ndi malo okhazikika kuti wafer isawonongeke. Granite ndi chinthu choyenera kupanga tebulo ili chifukwa lili ndi malo osalala, opanda mabowo omwe amapereka kukhazikika kwakukulu komanso kulondola. Kuphatikiza apo, granite ili ndi coefficient yochepa ya kutentha, zomwe zimapangitsa kuti isavutike ndi kusintha kwa kutentha komwe kungayambitse kusintha kwa mawonekedwe a wafer.

2. Gawo Lokhala ndi Mpweya

Gawo lokhala ndi mpweya limagwiritsidwa ntchito kunyamula wafer kudzera m'magawo osiyanasiyana opangira. Gawoli lapangidwa kuti lipereke kayendedwe kopanda kukangana, komwe kumafuna kulondola kwambiri komanso kukhazikika. Granite imagwiritsidwa ntchito pakugwiritsa ntchito izi chifukwa ndi mwala wolimba komanso wolimba, ndipo umalimbana ndi kusintha kwa zinthu komanso kuwonongeka pakapita nthawi.

3. Malangizo Oyendetsera Zinthu Molunjika

Zitsogozo zoyenda molunjika zimagwiritsidwa ntchito kutsogolera gawo lonyamula mpweya, ndipo ziyenera kuyikidwa bwino kuti zichepetse zolakwika. Granite imagwiritsidwa ntchito popanga chitsogozo ichi chifukwa chili ndi kukhazikika kwabwino kwa makina komanso mphamvu. Zipangizozo sizimakhudzidwa ndi dzimbiri, zomwe zimatsimikizira kuti dongosolo lotsogolera limakhala nthawi yayitali.

4. Zipangizo za Metrology

Zipangizo za Metrology zimagwiritsidwa ntchito poyesa kukula ndi mawonekedwe a wafer panthawi yopanga. Granite ndi chinthu choyenera kwambiri popanga chipangizochi chifukwa chimakhala cholimba kwambiri, sichimakula kwambiri, komanso sichimasintha kwambiri pamene chikulemera. Kuphatikiza apo, kukhazikika kwa kutentha kwa granite kumatsimikizira kuti zida za Metrology zimakhalabe zokhazikika komanso zolondola pakapita nthawi.

Pomaliza, makampani opanga zinthu zamagetsi zamagetsi amadalira kulondola ndi kulondola, ndipo zipangizo za granite zatsimikizika kuti ndizodalirika komanso zokhazikika popanga zinthu. Popeza pali zinthu zambiri zofunika kwambiri mu dongosolo losamutsa wafer zomwe zimafuna kukhazikika kwambiri, kulondola, komanso kutentha kochepa, mainjiniya agwiritsa ntchito zipangizo za granite kuti akwaniritse zofunikira izi.