Linear motor + granite base: Chinsinsi chachikulu cham'badwo watsopano wamakina otengera zinthu.

Muzochita zenizeni zopangira semiconductor, njira yosinthira yophatikizika ili ngati "njira yopangira chip", ndipo kukhazikika kwake ndi kulondola kwake kumatsimikizira mwachindunji kuchuluka kwa zokolola za tchipisi. M'badwo watsopano wamakina osamutsira ophatikizika amaphatikiza ma injini amzere okhala ndi maziko a granite, ndipo maubwino apadera a zida za granite ndizomwe zimafunikira kuti mutsegule kutumizira kogwira ntchito kwambiri.

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Maziko a granite: Kumanga "maziko olimba a thanthwe" kuti azitha kufalitsa mosasunthika
Granite, atadutsa zaka mazana mamiliyoni akuyengedwa kwa geological, imakhala ndi kristalo wonyezimira komanso wofanana wamkati. Makhalidwe achilengedwewa amapangitsa kuti ikhale yoyambira bwino pamakina otengera zophatikizika. M'malo ovuta a semiconductor cleanrooms, granite, ndi ultra-low coefficient of thermal expansion (5-7 × 10⁻⁶/℃ yokha), imatha kukana kutentha komwe kumapangidwa panthawi yogwiritsira ntchito zipangizo komanso mphamvu ya kusintha kwa kutentha kwa chilengedwe, kuonetsetsa kukhazikika kwa kukula kwa maziko ndi kupewa kupatuka kwa njira yopatsirana chifukwa cha kupatuka. Kugwedezeka kwake kochititsa chidwi kwambiri kumatha kuyamwa mwachangu kugwedezeka kwamakina komwe kumapangidwa poyambira, kutseka ndi kuthamangitsa ma motors ozungulira, komanso zosokoneza zakunja zomwe zimabweretsedwa ndi magwiridwe antchito a zida zina mumsonkhanowu, ndikupereka nsanja yokhazikika yokhala ndi "zero shake" yotumizira ma wafer. ku
Pakalipano, kukhazikika kwa mankhwala a granite kumatsimikizira kuti sikuwononga kapena dzimbiri mumisonkhano ya semiconductor kumene ma acid ndi alkali reagents ndi osasunthika komanso ukhondo wapamwamba umafunika, motero kupeŵa kukhudzidwa kwa kufalitsa molondola chifukwa cha ukalamba wakuthupi kapena kutsekemera kodetsa. Mawonekedwe osalala komanso owundana atha kuchepetsa kumatira kwa fumbi, kukwaniritsa miyezo yolimba yopanda fumbi ya zipinda zoyera ndikuchotsa chiwopsezo cha kuipitsidwa kwa nthiti kuchokera muzu. ku
"Golden Partnership" zotsatira za liniya motors ndi granite
Ma Linear motors, omwe ali ndi mawonekedwe opanda chilolezo chotumizira mawotchi, kuthamanga kwambiri komanso kuthamanga kwambiri kuyankha, kutumizira mawafa ndi zabwino "zachangu, zolondola komanso zokhazikika". Maziko a granite amapereka nsanja yolimba komanso yodalirika yothandizira. Awiriwa amagwirira ntchito limodzi kuti apindule kwambiri. Makina ozungulira akamayendetsa chonyamulira chowotcha kuti chithamangire panjira yoyambira ya granite, kukhazikika kolimba komanso kukhazikika kwa mazikowo kumatsimikizira kufalikira kwa mphamvu yoyendetsera galimoto, kupewa kutayika kwa mphamvu kapena kusefukira komwe kumachitika chifukwa cha deformation. ku
Motsogozedwa ndi kufunikira kwa kulondola kwa nanoscale, ma linear motors amatha kukwaniritsa chiwongolero cha sub-micron-level displacement control. Mawonekedwe olondola kwambiri a maziko a granite (okhala ndi zolakwika za flatness zomwe zimayendetsedwa mkati ± 1μm) zimagwirizana bwino ndi kuwongolera kolondola kwa ma linear motors, kuphatikiza kuwonetsetsa kuti cholakwika choyikirapo panthawi yopatsirana ndi yocheperapo ± 5μm. Kaya ndikuthamanga kwambiri pakati pa zida zosiyanasiyana zamakasitomala kapena kuyimitsidwa koyenera kwa ma wafer, kuphatikiza ma liniya ma motors ndi maziko a granite amatha kuonetsetsa kuti "zero kupatuka ndi zero jitter" pakutumiza kwa wafer. ku
Kutsimikizira kwamakampani: Kusintha kawiri pakuchita bwino komanso kuchuluka kwa zokolola
Pambuyo pokonzanso makina ake osinthira mawafa, bizinesi yotsogola yapadziko lonse lapansi idatengera njira yoyambira yamoto + ya granite, yomwe idakulitsa kusamutsa kwabwino ndi 40%, idachepetsa kuchuluka kwa zolakwika monga kugundana ndi kuwongolera panthawi yakusamutsa ndi 85%, ndikuwongolera kuchuluka kwa zokolola za tchipisi ndi 6%. Kumbuyo kwa deta kuli chitsimikiziro cha kukhazikika kwapatsirana komwe kumaperekedwa ndi maziko a granite komanso kuthamanga kwachangu komanso kolondola komwe kumayenderana ndi liniya motor, zomwe zimachepetsa kwambiri kutayika ndi zolakwika munjira yopatsirana yopyapyala. ku
Kuchokera kuzinthu zakuthupi mpaka kupanga mwatsatanetsatane, kuchokera pazabwino zamachitidwe mpaka kutsimikizira kothandiza, kuphatikiza kwa ma motors ozungulira ndi maziko a granite kwafotokozeranso miyezo yamakina osamutsira ophatikizika. M'tsogolomu pamene teknoloji ya semiconductor ikupita patsogolo ku 3nm ndi 2nm njira, zipangizo za granite zidzapitiriza kupititsa patsogolo chitukuko cha mafakitale ndi ubwino wawo wosasinthika.