Malangizo Oyendetsera Magalasi Olondola: Kukhazikitsa ndi Kukonza SOP kuyambira pa Flatness ≤0.005 mm/m mpaka ku Contamination Control

Mu mafakitale olondola kwambiri monga kupanga zinthu zopangidwa ndi semiconductor, zida zamagetsi, ndi kupanga ma panel owonetsera, makina oyendera amafunikira kusalala kwapadera, kukhazikika kwa geometry, ndi ukhondo wa chilengedwe. Njira zowongolera magalasi olondola zimagwiritsidwa ntchito kwambiri chifukwa cha kusalala kwawo kwapamwamba, kukana kuwonongeka, komanso kukhazikika kwa kutentha. Komabe, kuyika kosayenera kapena kusakonza bwino kungayambitse kusuntha kolondola, kuipitsidwa pamwamba, kukanda, komanso nthawi yokwera mtengo yogwira ntchito.

ZHONGHUI Group imapereka njira yokhazikika yokhazikitsira ndi kukonza makina kuti ithandize opanga kuti azitha kusalala ≤0.005 mm/m pomwe akuwonetsetsa kuti ntchito yawo ikuyenda bwino kwa nthawi yayitali.

1. Chifukwa Chake Malangizo Oyendetsera Magalasi Olondola Amafunika Ma SOP Okhwima

Poyerekeza ndi njanji zachitsulo zowongolera, njira zowongolera magalasi zimapereka:

• Kulondola kwa geometric kwapamwamba kwambiri

• Kusintha kwa kutentha kochepa

• Kusalala bwino kwambiri pamwamba

• Kukhazikika kwamphamvu kwa mankhwala

Komabe, zipangizo zagalasi zimakhala zosavuta kuziyika pamalo otayira zinthu, tinthu tating'onoting'ono toipitsidwa, komanso kusagwiritsidwa ntchito bwino, zomwe zimapangitsa kuti njira zoyendetsera zinthu zikhale zofunika kwambiri.

2. Zofunikira pa Kukhazikitsa

2.1 Kufunika kwa Kusalala

Kuti muwonetsetse kuti kuyenda kuli kolondola:

• Kusalala kwa malo oyika kuyenera kukhala ≤0.005 mm/m

• Maziko a nyumba ayenera kukonzedwa kale komanso kuchepetsedwa kupsinjika

• Kusathandizana kosagwirizana kumabweretsa zolakwika pakusintha kwa kapangidwe kake ndi malo ake

Njira Zovomerezeka Zopezera Matenda:

• Laser interferometry

• Magawo amagetsi

• Ma straightedges olondola okhala ndi ma feeler gauges

2.2 Malo Otentha Okhazikika

Kusintha kwa kutentha ndi chifukwa chachikulu cha kusinthasintha kwa geometric.

Miyezo Yachilengedwe:

• Kulamulira kutentha: 20 ± 1 °C

• Chinyezi: 40–55%

• Pewani mpweya woyenda mwachindunji pamalo otsogolera

Malo okhazikika achilengedwe amachepetsa kusagwirizana kwa kutentha pakati pa nyumba zomangira ndi magalasi.

2.3 Kusamalira ndi Kuyendera

Kusagwira bwino ntchito kungayambitse ming'alu yaying'ono kapena kusweka kwa m'mphepete.

Njira Zabwino Kwambiri:

• Gwiritsani ntchito zida zonyamulira vacuum kapena zothandizira zofewa zomangira

• Pewani kukhudzana ndi chitsulo pamalo olondola

• Sungani chithandizo chopingasa kuti mupewe kupindika

• Ma CD osagwedezeka panthawi yonyamula

2.4 Njira Zoyikira & Kukhazikitsa

• Gwiritsani ntchito mphamvu yolumikizira yogawidwa mofanana

• Pewani kupsinjika maganizo komwe kulipo

• Ikani ma elastic isolation pads ngati pakufunika kutero

• Limbitsani mabotolo mopingasa komanso pang'onopang'ono kuti mupewe kusokonekera

Kusakhazikika bwino ndi chimodzi mwa zifukwa zazikulu zomwe zimapangitsa kuti flatness isasinthe pambuyo pokhazikitsa.

3. Njira Zoyendetsera Ntchito Zosamalira (SOP)

3.1 Zida Zoyeretsera Zovomerezeka ndi Othandizira

Njira zoyendetsera galasi zimafuna njira zoyeretsera zosawononga.

Zipangizo Zovomerezeka:

• Zopukutira za microfiber zopanda lint

• IPA (Isopropyl Alcohol) kapena zotsukira magalasi zosalowerera

• Maburashi oletsa kusinthasintha

Pewani:

• Zosungunulira za asidi kapena zamchere

• Zokanda zitsulo kapena nsalu zokwawa

• Mpweya wothamanga kwambiri umapumira mwachindunji zinthu zodetsa

3.2 Kuchuluka kwa Kuyendera

Kuwunika kwachizolowezi kuyenera kuphatikizapo:

• Kuipitsidwa pamwamba

• Kuzindikira kukanda pang'ono pansi pa kuwala kozungulira

• Kutsimikiziranso kusalala

• Kulondola kwa kulinganiza

3.3 Zophimba Zoteteza & Kupewa Fumbi

Tinthu touluka ndi chiwopsezo chachikulu pa kayendedwe kolondola.

Njira Zodzitetezera:

• Zophimba zoteteza za telescopic

• Ma enclosure ofewa a bellows

• Choteteza mpweya wabwino ndi mphamvu yabwino

• Makanema oletsa fumbi

Mayankho amenewa amachepetsa kwambiri zoopsa za kuipitsidwa ndi kukulitsa nthawi ya ntchito.

4. Kuyang'anira Kusalala & Kutsimikizira Kulondola

Kutsimikizira nthawi zonse kumatsimikizira kudalirika kwa ntchito.

Njira Zowunikira:

• Mapu a laser interferometer

• Makina a Autocollimator

• Masensa olondola kwambiri osunthika

Ngati kuphwanyika kukupitirira kulekerera:

• Sinthani maziko kukhala ofanana

• Yang'anani kugawa kwa kupsinjika kwa malo oikira

• Yang'anani ngati pali kuipitsidwa pamalo othandizira

5. Malangizo ndi Mayankho Othandiza Okhudza Kupweteka kwa Opaleshoni

Vuto 1: Kuthamanga Molondola

Chifukwa: Kusintha kwa kutentha, chithandizo chosagwirizana
Yankho: Malo olamulidwa + kukonzanso nthawi ndi nthawi

Vuto Lachiwiri: Kuipitsidwa ndi Malo Ozungulira & Kukanda

Chifukwa: Tinthu touluka, zida zoyeretsera zosayenerera
Yankho: Ndondomeko za Chipinda Chotsukira + zipangizo zotsukira zovomerezeka

Vuto 3: Nthawi Yosayembekezereka Yogwira Ntchito pa Zipangizo

Chifukwa: Kuwonongeka kwa msewu wotsogolera kapena kulephera kuwongolera
Yankho: Ndondomeko yowunikira yodzitetezera + chitetezo choteteza

6. Mapulogalamu Abwino Kwambiri

Njira zoyendetsera magalasi olondola zimagwiritsidwa ntchito kwambiri mu:

• Zipangizo Zopangira Ma Semiconductor

• Kuyang'anira Maso ndi Machitidwe a Metrology

• Mizere Yopanga Yowonetsera Panja Yathyathyathya

Makampani amenewa amapindula ndi kuyenda bwino kwa magalasi, kutentha kochepa, komanso kuyanjana kwambiri ndi chilengedwe.

Mapeto

Kukwaniritsa kusalala kwa ≤0.005 mm/m ndiye poyambira pakugwira ntchito bwino kwa njira yowongolera magalasi. Njira zoyenera zoyikira ndi makina owongolera kuipitsidwa ndizofunikira kwambiri kuti zisunge kulondola kwa nthawi yayitali.

Mwa kukhazikitsa ma SOP okhazikika, opanga akhoza:

✔ Pewani kusuntha kolondola
✔ Chepetsani kuipitsidwa ndi kuwonongeka kwa pamwamba
✔ Chepetsani nthawi yopuma yosakonzekera
✔ Kuonjezera nthawi yogwira ntchito ya makina oyenda molondola

ZHONGHUI Group (ZHHIMG) imapereka zida zogwirira ntchito bwino kwambiri komanso nsanja zoyendera zomwe zimapangidwa kuti zigwiritsidwe ntchito kwambiri m'makampani omwe akufuna kwambiri padziko lonse lapansi.