Kuwongolera Moyenda Molondola: Kuyerekeza Magawo Onyamula Mpweya ndi Ma Granite Systems mu Optical Metrology

Kufunafuna kosalekeza kulondola kwa nanometer pakupanga ma semiconductor ndi kuyang'anira kwakukulu kwa kuwala kwapangitsa kuti makina owongolera mayendedwe azifunike kwambiri. Mainjiniya nthawi zambiri amakumana ndi chisankho chofunikira kwambiri: kukongola kosagwedezeka kwa magawo onyamula mpweya kapena kudalirika kwamphamvu komanso kosasunthika kwa magawo amakina opangidwa ndi granite. Ku ZHHIMG Group, timazindikira kuti yankho labwino kwambiri nthawi zambiri limakhala pa malo olumikizirana pakati pa sayansi ya zinthu ndi mphamvu yamadzimadzi.

Mkangano Waukulu: Magawo Okhala ndi Mpweya vs Magawo a Granite

Kuti mumvetse kusiyana kwake, muyenera kuyang'ana momwe zimagwirira ntchito. Magawo achikhalidwe a granite nthawi zambiri amagwiritsa ntchito mabearing olondola kwambiri amakina—monga cross-roller kapena ball slides—olumikizidwa mwachindunji pamaziko a graniteMakina amenewa ndi ofunika kwambiri chifukwa cha mphamvu yawo yonyamula katundu wambiri komanso kuuma kwawo kwakukulu. Mphamvu zachilengedwe za granite zimathandiza kuti kugwedezeka kulikonse kotsalira kuchokera ku injini kapena chilengedwe kuthe msanga, zomwe zimapangitsa kuti zikhale zofunikira kwambiri pa metrology yolemera.

Mosiyana ndi zimenezi, magawo onyamula mpweya amaimira kusalala kwapamwamba kwambiri. Mwa kuthandizira ngolo yoyenda pa filimu yopyapyala ya mpweya wopanikizika—nthawi zambiri umakhala ndi makulidwe ochepa chabe a microns—magawo awa amachotsa kukhudzana kwenikweni. Kusowa kwa kukangana kumeneku kumatanthauza kuti palibe kukangana ndi kuwonongeka, zomwe zimapangitsa kuti liwiro lokhazikika lizifunika pofufuza. Ngakhale kuti ma bearing a mpweya amapereka kulondola kwapamwamba kwa geometry, amafunikira mpweya woyera komanso wouma ndipo nthawi zambiri amakhala omasuka kwambiri ndi katundu wosiyana ndi wina poyerekeza ndi makina ena.

Kusanthula Mitundu ya Magawo Owona a Mapulogalamu Apadera

Gawo la kuwala limafuna ma profiles apadera oyendera, zomwe zimapangitsa kuti pakhale magawo osiyanasiyana owonera. Kusankha mtundu woyenera kumadalira madigiri a ufulu wofunikira komanso malo owunikira.

Magawo a kuwala kwa mzere mwina ndi omwe amapezeka kwambiri, pogwiritsa ntchito zomangira za lead zama mota amphamvu kwambiri kapena zolumikizira kuti zifulumizitse kwambiri. Pamene kulunjika kwa nanometer kukufunika paulendo wautali, magawo a mzere okhala ndi mpweya nthawi zambiri amagwirizanitsidwa ndi ma laser interferometer kuti apereke mayankho.

Magawo ozungulira owunikira ndi ofunikira kwambiri poyesa kotengera ngodya, monga goniometry kapena kuyang'ana pakati pa zinthu za lens. Magawo ozungulira ozungulira okhala ndi mpweya ndi opindulitsa kwambiri pano, chifukwa amawonetsa kuzungulira kwa axial ndi radial pafupi ndi zero, kuonetsetsa kuti mzere wozungulira umakhalabe wolunjika bwino panthawi yozungulira.

Makina ozungulira ambiri, monga XY kapena XYZ stacks, amagwiritsidwa ntchito nthawi zambiri poyang'anira ma wafer okha. Mu makonzedwe awa, kusankha maziko a granite sikungatheke kukambirana. Granite imapereka kulemera kofunikira komanso kutentha koyenera kuti alepheretse kuyenda kwa axis imodzi kusokoneza kulondola kwa ina.

Kugwirizana kwa Granite ndi Air Bearings

Ndi lingaliro lolakwika lofala kuti magawo onyamula mpweya ndimagawo a graniteZimagwirizana. Ndipotu, makina oyendera apamwamba kwambiri ndi osakanikirana ndi awiriwa. Magawo okwera mpweya amagwiritsa ntchito granite ngati malo otsogolera. Chifukwa chake ndi kuthekera kwa granite kukhala yolumikizidwa ku sub-micron flatness m'malo akuluakulu - chinthu chovuta kuchita ndi aluminiyamu kapena chitsulo.

Popeza ma bearing a mpweya "amachotsa" kusokonekera kwa pamwamba pa chitsogozo, kusalala kwambiri kwa granite yopangidwa ndi ZHHIMG kumalola filimu ya mpweya kukhala yofanana paulendo wonse. Mgwirizanowu umabweretsa machitidwe oyenda omwe amapereka zabwino kwambiri: kuyenda kwa mpweya popanda kukangana komanso kukhazikika kwa granite ngati miyala.

Metrology ya Zamalonda

Zoganizira Zokhudza Kusamalira ndi Kusamalira Zachilengedwe

Kugwiritsa ntchito makinawa kumafuna kulamulira bwino chilengedwe. Magawo a granite a makina ndi olimba koma amafunika kudzola nthawi ndi nthawi ndi kuyeretsa njira zoyendetsera mabearing kuti apewe kusonkhanitsa zinyalala. Makina oyendetsera mpweya, ngakhale kuti alibe kukonza pankhani ya kudzola, amadalira mtundu wa mpweya womwe umagwiritsidwa ntchito. Chinyezi kapena mafuta aliwonse omwe ali mumzere wa mpweya angayambitse "kutsekeka kwa denga," zomwe zingawononge filimu ya mpweya ndikuyambitsa kukhudzana kwakukulu pamwamba.

Kuphatikiza apo, kasamalidwe ka kutentha n'kofunika kwambiri. Makina onse awiriwa amapindula ndi kuchuluka kwa kutentha kwa granite, komwe kumagwira ntchito ngati chotenthetsera kutentha kwa ma linear motors. Komabe, mu ntchito za nanometer-scale, ngakhale kusinthasintha kwa digiri imodzi ya Celsius kungayambitse kukula kwakukulu. Ma lab akatswiri nthawi zambiri amagwiritsa ntchito malo apadera a granite kuti asunge nyengo yokhazikika kuzungulira siteji.

Mapeto: Kusankha Maziko Oyenera a Luso Lanu

Kaya ntchito yanu ikufuna mphamvu yayikulu yonyamula katundu ya gawo la granite la makina kapena kuwongolera liwiro losalala kwambiri la dongosolo lonyamula mpweya, maziko ake akadali gawo lofunika kwambiri. Ku ZHHIMG, sitingopereka magawo okha; timapereka chitsimikizo cha geological ndi makina chofunikira pa ntchito zanu zazikulu kwambiri. Pamene mafakitale a semiconductor ndi optical akupita patsogolo kwambiri, kudzipereka kwathu kuzinthu zabwino komanso uinjiniya wolondola kumatsimikizira kuti makina anu owongolera mayendedwe sadzakhala chinthu choletsa kafukufuku wanu kapena kupanga.


Nthawi yotumizira: Januwale-22-2026