8 Kugwiritsa Ntchito Kawirikawiri kwa Zigawo za Granite Zolondola mu Zipangizo za Semiconductor

Mu makampani opanga ma semiconductor, komwe "nanometer" ndiye muyezo woyezera, kulimba kwa kapangidwe ka zida sikungatheke kukambirana. Pamene ma chip node akuchepa kufika pa 5nm ndi kupitirira apo, kufunikira kwa kugwedezeka kwa kugwedezeka ndi kukhazikika kwa kutentha kumafika pamlingo woopsa kwambiri. Zigawo za granite zolondola zasintha kuchoka pakukhala njira yapamwamba kupita ku "DNA" yofunika kwambiri ya zida zopangira ma semiconductor.

Monga kampani yotsogola yopereka zida zokhazikika kwambiri, ZHHIMG® imasanthula ntchito zisanu ndi zitatu zofunika kwambiri zomwe granite ndiye ngwazi yopanda phokoso ya zinthu zopangidwa mwaluso.

1. Maziko a Makina Opangira Ma Lithography

Makina a lithography ndi chida chovuta kwambiri mu unyolo wa semiconductor. Pansi pake payenera kukhala ndi makina akuluakulu owunikira pomwe pamakhala bata. Kuchuluka kwa granite komanso kuuma kwamkati kumalola kuti itenge kugwedezeka kwa micro-environment kuchokera ku chilengedwe chozungulira, kuonetsetsa kuti gwero la kuwala limakhalabe lolunjika pamlingo wa atomiki.

2. Magawo Oyendera Mpweya

Kunyamula wafer wothamanga kwambiri kumafuna kuyenda kopanda kukangana. Popeza granite imatha kulumikizidwa ku sub-micron flatness, imakhala ngati mnzawo woyenera kwambiri paukadaulo wonyamula mpweya. "Mpweya wa mpweya" umayandama pamwamba pa granite popanda kuwonongeka, zomwe zimapangitsa kuti kuyenda kosalala kwambiri kumafunika pofufuza ndi kuyika malo.

3. Mapulatifomu Oyendera ndi Kuyeza Zinthu Zofunika

Pambuyo pocheka, ma wafer ayenera kufufuzidwa kuti awone ngati ali ndi zolakwika. Kukulitsa kutentha kulikonse mu chimango cha makina kungayambitse "chitsimikizo chabodza" kapena cholakwika chomwe sichinachitike.Zigawo za granite zolondola kwambirikupereka malo opanda kutentha, kuonetsetsa kuti deta yowunikira ikuwonetsa bwino pamwamba pa wafer, osati kupotoka kwa makina.

4. Makina Oyendera a Gantry (Kapangidwe ka Mlatho)

Mu ma dicing othamanga kwambiri kapena ma waya omangirira, "mlatho" kapena gantry iyenera kuyenda mofulumira popanda kugwedezeka. Gantry ya granite imapereka chiŵerengero chapamwamba cha kuuma poyerekeza ndi chitsulo chopangidwa, zomwe zimachepetsa kwambiri "nthawi yokhazikika" - nthawi yomwe makina ayenera kudikira kuti kugwedezeka kuyime asanayambe ntchito yake yotsatira.

5. Mafelemu a Zipangizo Zokonzera Laser

Ngati pali vuto pa chigoba kapena wafer, ma laser amagwiritsidwa ntchito kukonza molondola. Izi zimafuna maziko omangira omwe sagwiritsa ntchito maginito konse komanso osayendetsa magetsi. Granite imateteza mwachilengedwe, zomwe zimaletsa kusokonezeka kwa maginito kuti kusakhudze njira yofewa ya laser.

6. CMM (Makina Oyezera Ogwirizana) a Zipinda Zotsukira

Kuwongolera khalidwe mkati mwa malo opangira zinthu zamagetsi kumafuna ma CMM omwe amatha kupirira malamulo okhwima a zipinda zoyera. Mosiyana ndi chitsulo, chomwe chingatulutse tinthu tating'onoting'ono kapena oxidize, granite ndi yolimba ndi asidi komanso yolimba, imasunga kapangidwe ka zida zokhazikika popanda kuipitsa chilengedwe.

7. Maziko a Kupukuta kwa Makina a Mankhwala (CMP)

Njira ya CMP imaphatikizapo matope ndi mankhwala omwe amawononga kwambiri zitsulo. Kukana kwachilengedwe kwa mankhwala a granite kumapangitsa kuti ikhale chinthu choyenera kwambiri pamaziko a zida zopukutira, zomwe zimapangitsa kuti ikhale nthawi yayitali ngakhale m'malo ovuta a mankhwala.

8. Machitidwe Okhazikitsa Ma Ion

Malo okhala ndi mphamvu zambiri m'ma ioni implants amafuna zinthu zomwe sizingasokoneze ma ion beams kapena kupanga arcing yamagetsi. Kapangidwe ka dielectric ka Granite kamapangitsa kuti ikhale chisankho chotetezeka komanso chokhazikika chokhazikitsa zinthu zamagetsi ndi vacuum zomwe zimakhala zovuta kuziyika.

Chifukwa chiyani ZHHIMG® imagwiritsa ntchito njira zopangira zinthu za Semiconductor?

Ku ZHHIMG®, tikumvetsa kuti maziko a zida za semiconductor si chinthu chamwala chabe—ndi chida choyezera. Granite yathu yapadera yakuda, pamodzi ndi ukatswiri wathu wa zaka zoposa 30 wopera ndi manja, imatithandiza kupeza magiredi osalala komanso ofanana omwe amakwaniritsa zofunikira za nthawi ya sub-micron.

• Zipangizo: Granite wakuda wa ZHHIMG® wokhuthala kwambiri, wopyapyala kwambiri.

• Kulondola: Magiredi olondola malinga ndi DIN 876 Giredi 00 kapena zomwe JIS/ASME imanena.

• Kusintha: Ma inserts ophatikizidwa, malo oimikapo T, ndi njanji zonyamula mpweya zomwe zayikidwa kale m'ma workshop athu a 10,000m² okhala ndi kutentha kosasintha.