Kusankha Pakati pa Granite ndi Ceramic pa Next-Gen Lithography

Mu dziko la nanometer la semiconductor lithography, kugwedezeka pang'ono kwa kapangidwe kake kapena kukulitsa kutentha pang'ono kungapangitse kuti silicon wafer ya madola mamiliyoni ambiri ikhale yopanda ntchito. Pamene makampaniwa akupita ku ma node a 2nm ndi kupitirira apo, zipangizo zomwe zimagwiritsidwa ntchito popanga maziko a makina sizimangokhala "zothandizira" chabe - ndi omwe akuchita nawo chidwi chofuna kulondola.

Ku ZHHIMG, makampani opanga magetsi padziko lonse lapansi akutifunsa mafunso ambiri: Kodi tiyenera kutsatira kukhazikika kwa granite kolondola, kapena kodi nthawi yakwana yoti tisinthe kukhala zinthu zapamwamba zaukadaulo? Yankho lili mu fizikisi yeniyeni ya ntchito yanu.

Fiziki ya Kukhazikika: Granite vs. Ceramic

Poyerekezazigawo za granite zolondolandi ziwalo za ceramic, tiyenera kuyang'ana "utatu woyera" wa uinjiniya wolondola: Kunyowetsa, Kukhazikika kwa Kutentha, ndi Kuuma.

1. Kuchepetsa Kugwedezeka: Ubwino wa Kapangidwe Kachilengedwe

Kugwedezeka ndi mdani wa mphamvu yotulukira. Granite, mwala wachilengedwe wopangidwa ndi igneous, uli ndi kapangidwe ka polycrystalline kovuta komwe kamagwira ntchito ngati choyamwa chachilengedwe. Kukangana kwamkati kumeneku kumalola granite kutulutsa mphamvu zamakanika bwino kwambiri kuposa zinthu zambiri zopangidwa.

Mosiyana ndi zimenezi, zinthu zomangira zaukadaulo monga Silicon Carbide (SiC) kapena Alumina ndi zolimba kwambiri. Ngakhale kuti zinthu zomangira zaukadaulozi n’zothandiza kwambiri poyankha pafupipafupi, zinthu zomangira zaukadaulozi sizimawononga kwambiri mkati. Mu malo opangidwa ndi lithography, komwe magawo amathamanga kwambiri, maziko a granite ochokera ku ZHHIMG amapereka malo "achete" ofunikira kuti zinthu zomangira za digito zikhale zolunjika bwino.

2. Kusintha kwa Kutentha: Kusamalira Micron

Kukulitsa kutentha nthawi zambiri kumakhala vuto lalikulu pakulondola kwa nthawi yayitali. Granite yachilengedwe imakhala ndi coefficient yotsika kwambiri ya kukulitsa kutentha (CTE), nthawi zambiri imakhala pafupifupi 5 × 10^{-6}/K mpaka 6 × 10^{-6}/K.

Zipangizo zamakono zadothi zimatha kupeza CTE yotsika kwambiri, koma nthawi zambiri zimakhala ndi kutentha kochepa. Izi zikutanthauza kuti ngakhale kuti zimakula pang'ono, zimachitapo kanthu mwachangu kwambiri kusinthasintha kwa kutentha kwa mlengalenga. Kutentha kwakukulu kwa Granite kumagwira ntchito ngati "buffer," zomwe zimapangitsa kuti ikhale chisankho chabwino kwambiri kwa anthu akuluakulu.maziko a makina a lithographykomwe chilengedwe chiyenera kukhala chokhazikika kwa maola ambiri ogwira ntchito mosalekeza.

Zipangizo za Lithography Frontier

Makina amakono a lithography mwina ndi chida chovuta kwambiri chomwe chinapangidwapo. Pa mafelemu akuluakulu a kapangidwe kake, makampani akhala akugwiritsa ntchitoZigawo Zolondola za Granitechifukwa cha chibadwa chawo chosakhala ndi maginito komanso kukana dzimbiri.

Komabe, pazinthu zinazake zoyenda mwachangu kwambiri mkati mwa lithography stack—monga wafer chucks kapena short-stroke stages—ceramics ikukulirakulira chifukwa cha kuchuluka kwawo kwa kuuma ndi kulemera. Ku ZHHIMG, timaona tsogolo osati ngati mpikisano pakati pa zipangizozi, koma ngati kuphatikiza kwa hybrid. Pogwiritsa ntchito maziko a granite a maziko ndi ceramic pazinthu zosinthasintha kwambiri, mainjiniya amatha kukwaniritsa bwino kwambiri kuuma ndi kuthamanga.

Chifukwa Chake ZHHIMG Ndi Wogulitsa Wokondedwa Padziko Lonse

Monga mtsogoleriwogulitsa zigawo za granite molondolaZHHIMG ikumvetsa kuti kulondola sikungokhudza zinthu zopangira zokha; koma ndi za metrology yomwe ili kumbuyo kwake. Malo athu amagwiritsa ntchito vacuum-degassing pazinthu zonse zopangidwa mwamakonda komanso njira zolumikizira bwino kwambiri zomwe zimaposa miyezo ya DIN 876 Giredi 00.

Timachita bwino kwambiri pa:

• Maziko a Granite Opangidwa Mwamakonda a OEM: Ma geometries opangidwa mwaluso okhala ndi zoyikapo za ulusi zolumikizidwa kuti zikhale zotsogolera zolunjika.

• Zigawo Zovuta za Lithography: Kupanga maziko akuluakulu omwe amasunga kusalala mkati mwa 1 micron pa mamita angapo.

• Advanced Metrology: Kupereka miyezo yowunikira zida zowunikira zomwe ndi zodziwika bwino kwambiri padziko lonse lapansi.

Kutsiliza: Njira Yanzeru Yopitira Patsogolo

Kusankha pakati pa granite ndi ceramic kumafuna kumvetsetsa bwino momwe makina anu amagwirira ntchito. Ngakhale kuti ceramics imapereka kulimba kwapamwamba, kuuma kwachilengedwe ndi kutentha kwa granite sikunafanane ndi kukhazikika kwakukulu.

Pamene tikuyang'ana chaka cha 2026, ZHHIMG ikupitiliza kupanga zinthu zatsopano pamalo olumikizirana miyala yachilengedwe ndi zinthu zamakono. Sitikungopereka maziko okha; timapereka chitsimikizo chakuti zida zanu zigwira ntchito mokwanira.

Lumikizanani ndi gulu la mainjiniya la ZHHIMG lero kuti mulandire pepala lofananiza luso kapena kukambirana za zofunikira pa ntchito yanu.