Sindikizani "mphamvu yamwala" kumbuyo kwa kupanga semiconductor - Kodi zigawo zolondola za granite zingasinthe bwanji malire olondola akupanga chip

Kusintha kwa Precision pakupanga semiconductor: Pamene granite ikumana ndi ukadaulo wa micron
1.1 Zopezedwa zosayembekezereka mu sayansi yazinthu
Malinga ndi lipoti la 2023 la SEMI International Semiconductor Association, 63% ya nsalu zapamwamba zapadziko lonse lapansi zayamba kugwiritsa ntchito maziko a granite m'malo mwa nsanja zachitsulo. Mwala wachilengedwe uwu, womwe umachokera ku magma condensation pansi pa Dziko Lapansi, ukulembanso mbiri ya kupanga semiconductor chifukwa cha mawonekedwe ake apadera:

Kutentha kwa inertia: mphamvu yowonjezera kutentha kwa granite 4.5 × 10⁻⁶/℃ ndi 1/5 yokha ya chitsulo chosapanga dzimbiri, ndipo kukhazikika kwapakati pa ± 0.001mm kumasungidwa pakugwira ntchito kosalekeza kwa makina a lithography.

Kugwedera damping makhalidwe: mkangano coefficient mkati ndi 15 kuwirikiza 15 kuposa chitsulo choponyedwa, bwino kuyamwa zida micro-kugwedera.

Chikhalidwe cha Zero magnetization: Chotsani cholakwika cha maginito pakuyeza kwa laser

1.2 Ulendo wa metamorphosis kuchokera ku mgodi kupita ku nsalu
Kutengera maziko opangira mwanzeru a ZHHIMG ku Shandong mwachitsanzo, chidutswa cha granite yaiwisi chiyenera kuchitidwa:

Kupanga makina olondola kwambiri: malo olumikizirana ma axis asanu kwa maola 200 a mphero mosalekeza, roughness mpaka Ra0.008μm

Chithandizo cha ukalamba wochita kupanga: maola 48 akutulutsa kupsinjika kwachilengedwe pakutentha kosalekeza ndi chinyezi, zomwe zimapangitsa kukhazikika kwa mankhwalawa ndi 40%
Chachiwiri, sokonezani mavuto asanu ndi limodzi olondola a semiconductor kupanga "rock solution"
2.1 Chiwembu chochepetsa kugawikana kwa Wafer

Chiwonetsero: Pambuyo poyambitsa chip ku Germany kutengera nsanja yathu yoyandama ya granite:

Wafer diameter	kuchepetsa mtengo wa chip	kusintha kwa flatness
12 inchi	67%	≤0.001mm
18 inchi	82%	≤0.0005mm

2.2 Lilithographic alignment kulondola dongosolo lopambana

Njira yolipirira kutentha: chophatikizika cha ceramic sensor imayang'anira mawonekedwe osinthika munthawi yeniyeni ndipo imangosintha mawonekedwe a nsanja.
Deta yoyezedwa: pansi pa kusinthasintha kwa 28 ℃ ± 5 ℃, kulondola kwa kuyika kumasinthasintha osakwana 0.12μm