Njira zodziwira kusalala kwa nsanja za granite zolondola.

Pazinthu zopanga mwatsatanetsatane komanso kafukufuku wasayansi, kusalala kwa nsanja zolondola za granite ndi chizindikiro chachikulu chowonetsetsa kuti zida ndi zolondola. M'munsimu ndikufotokozera mwatsatanetsatane njira zingapo zozindikirira komanso njira zake zogwirira ntchito kwa inu. ku
I. Laser interferometer Detection njira
Laser interferometer ndiye chida chomwe chimakondedwa pakuzindikira kutsika kwapamwamba kwambiri. Tengani ZYGO GPI XP laser interferometer mwachitsanzo, kusamvana kwake kumatha kufika 0.1nm. Pochita kudziwika, choyamba gwirizanitsani gwero la kuwala kwa interferometer ndi nsanja ndikugawanitsa malo a pulatifomu m'madera a 50mm × 50mm grid. Pambuyo pake, deta yosokoneza fringe inasonkhanitsidwa mfundo ndi mfundo, ndipo deta inayikidwa ndikuwunikidwa pogwiritsa ntchito Zernike polynomial kuti apeze cholakwika cha flatness. Njirayi imagwira ntchito pamapulatifomu olondola kwambiri ndipo imatha kuzindikira zolakwika za flatness ≤0.5μm/m². Amagwiritsidwa ntchito kwambiri pozindikira makina a photolithography ndi nsanja zapamwamba zamakina atatu olumikizira makina oyezera. ku
Ii. Electronic Level Array Njira
Kuzindikira kwamtundu wamagetsi ndikosavuta kugwiritsa ntchito komanso kothandiza kwambiri. Mulingo wamagetsi wa TESA A2 (wokhala ndi 0.01μm/m) unasankhidwa ndikukonzedwa mumndandanda wa 9 × 9 motsatira njira ya X/Y ya nsanja. Pogwiritsa ntchito synchronously deta yokhotakhota pa mlingo uliwonse ndikugwiritsanso ntchito njira yochepera kwambiri yowerengera, mtengo wa flatness ukhoza kupezedwa molondola. Njirayi imatha kuzindikira bwino za concavity ndi convexity za nsanja. Mwachitsanzo, kusinthasintha kwa 0.2μm mkati mwa 50mm kungathenso kuzindikirika, komwe kuli koyenera kuzindikiridwa mofulumira pakupanga kwakukulu. ku
Iii. Njira ya Optical Flat crystal
Njira ya optical flat crystal ndiyoyenera kuzindikira nsanja zazing'ono. Gwirizanitsani kristalo wowoneka bwino pamwamba kuti muyesedwe papulatifomu ndikuwona zosokoneza zomwe zimapangidwa pakati pawo powunikira kuwala kwa monochromatic (monga nyali ya sodium). Ngati mikwingwirimayo ili yofanana mikwingwirima yowongoka, izi zikuwonetsa kusalala bwino. Ngati mikwingwirima yopindika ikuwoneka, werengerani cholakwika cha kuphwanthika potengera kuchuluka kwa mizere yopindika. Mzere uliwonse wokhotakhota umayimira kusiyana kwa kutalika kwa 0.316μm, ndipo deta ya flatness ingapezeke kupyolera mu kutembenuka kosavuta. ku
Zinayi. Njira zitatu zolumikizira makina oyezera makina
Makina oyezera amitundu itatu amatha kukwaniritsa muyeso wolondola kwambiri m'malo amitundu itatu. Ikani nsanja ya granite pa tebulo logwirira ntchito la makina oyezera ndikugwiritsa ntchito kafukufukuyu kuti mutengere mofananamo deta kuchokera kuzinthu zambiri zoyezera pamwamba pa nsanja. Makina oyezera amayendetsa ndikusanthula deta iyi kuti apange lipoti la flatness la nsanja. Njirayi siyingangozindikira kutsika, komanso kupeza magawo ena a geometric papulatifomu nthawi imodzi, ndipo ndiyoyenera kuzindikira bwino nsanja zazikulu za granite. ku
Kudziwa njira zodziwira izi kungakuthandizeni kuwunika molondola kutsetsereka kwa nsanja yolondola ya granite ndikupereka chitsimikizo chodalirika cha ntchito yokhazikika ya zida zolondola.