Pankhani yopanga zinthu zapamwamba komanso kafukufuku wa sayansi wamakono, gawo loyenda bwino kwambiri la mpweya woyandama lakhala chida chofunikira kwambiri chogwiritsira ntchito bwino komanso kuyeza bwino chifukwa cha magwiridwe ake abwino kwambiri. Maziko olondola a granite, monga maziko othandizira, ali ndi zofunikira kwambiri pa malo ogwirira ntchito, ndipo malo oyenera achilengedwe ndiye maziko otsimikizira kuti amagwira ntchito bwino komanso kuti zinthu zikuyenda bwino.
Choyamba, kuwongolera kutentha: "stabilizer" yolondola
Ngakhale granite imadziwika ndi kukhazikika kwake, siili yotetezeka kwathunthu ku kusintha kwa kutentha. Ngakhale kuti kuchuluka kwake kwa kutentha kumakhala kochepa, nthawi zambiri 5-7 × 10⁻⁶/℃, muzochitika zowongolera mayendedwe molondola kwambiri, kusinthasintha pang'ono kwa kutentha kungayambitsebe kusintha kwa mawonekedwe ndikukhudza kulondola kwa module. Mu malo opangira ma chip a semiconductor, njira ya lithography imafuna kulondola kwa malo a danami, ndipo kutentha kwa malo kumasinthasintha ndi 1 ° C, ndipo maziko a granite okhala ndi kutalika kwa mbali ya mita imodzi amatha kupanga kukula kwa mzere kapena kupindika kwa ma microns 5-7. Kusintha kwakung'ono kumeneku kumafalikira ndi module yoyenda molondola kwambiri ya air float, zomwe ndizokwanira kupangitsa kuti chip lithography pattern isinthe ndikuchepetsa kwambiri phindu. Chifukwa chake, yokhala ndi maziko olondola a granite a gawo loyenda bwino kwambiri la mpweya, kutentha koyenera kwa malo ogwirira ntchito kuyenera kulamulidwa pa 20 ° C ± 1 ° C, mothandizidwa ndi zida zotenthetsera zokhazikika, monga makina oziziritsira kutentha ndi chinyezi chokhazikika, kuyang'anira kosalekeza ndikusintha kutentha kozungulira, kuonetsetsa kuti kusinthasintha kwa kutentha kumakhala kochepa kwambiri, kusunga kukhazikika kwa kukula kwa maziko, kuonetsetsa kuti gawoli likugwira ntchito molondola kwambiri.
Chachiwiri, kasamalidwe ka chinyezi: chinsinsi cha chitetezo choteteza chinyezi "mwala"
Chinyezi ndi chinthu china chofunikira chomwe chimakhudza magwiridwe antchito a maziko a granite olondola. Mu malo okhala ndi chinyezi chambiri, granite ndi yosavuta kuyamwa nthunzi yamadzi, zomwe zingayambitse kuuma pamwamba, zomwe sizimangokhudza kukhazikika kwa kulumikizana kwa granite ndi gawo loyenda bwino kwambiri la mpweya woyandama, komanso zingayambitse kukokoloka kwa pamwamba ndikuchepetsa kuwala ndi kulondola pakapita nthawi. Mu malo opukutira magalasi owoneka bwino, ngati chinyezi chili chokwera kuposa 60%RH kwa nthawi yayitali, nthunzi yamadzi yomwe imalowa pamwamba pa maziko a granite idzasokoneza kayendedwe ka slider yoyandama ya gasi, kotero kuti kulondola kwa kugaya kwa lens kuchepe, ndipo pamwamba pake pakhale zolakwika. Chifukwa chake, chinyezi cha malo ogwirira ntchito chiyenera kulamulidwa mosamala pakati pa 40%-60%RH, chomwe chingayang'aniridwe ndikusinthidwa nthawi yeniyeni poyika zochotsera chinyezi, zowunikira chinyezi ndi zida zina kuti zisawononge maziko a granite chifukwa cha chinyezi chambiri, ndikuwonetsetsa kuti gawo loyenda bwino kwambiri la mpweya woyandama likugwira ntchito bwino.
Chachitatu, chitsimikizo cha ukhondo: "woteteza" wa kulondola
Kuwonongeka kwa tinthu ta fumbi pa maziko a granite olondola a gawo loyenda bwino kwambiri la kuyandama kwa mpweya sikunganyalanyazidwe. Tinthu tating'onoting'ono tikangolowa mumpata wa filimu ya gasi pakati pa choyandama cha gasi ndi maziko a granite, tingawononge kufanana kwa filimu ya gasi, kuwonjezera kukangana, komanso kukanda pamwamba pa maziko, zomwe zimapangitsa kuti kulondola koyenda kuchepe. Mu malo opangira zinthu zoyendera ndege, ngati tinthu ta fumbi mumlengalenga tagwera pa maziko a granite, njira yoyendetsera chida chogwirira ntchito ikhoza kusokonekera, zomwe zimakhudza kulondola kwa zinthuzo. Chifukwa chake, malo ogwirira ntchito ayenera kukhala oyera kwambiri, kufika pa miyezo 10,000 kapena kuposerapo ya ukhondo, kudzera mu kukhazikitsa zida zoyeretsera mpweya, monga zosefera mpweya zogwira ntchito bwino (HEPA), kusefa tinthu ta fumbi mumlengalenga, nthawi yomweyo, antchito ayenera kuvala zovala zopanda fumbi, zophimba nsapato, ndi zina zotero, kuti achepetse fumbi lomwe anthu amabweretsa. Sungani malo ogwirira ntchito olondola kwambiri a maziko a granite ndi gawo loyenda loyenda loyenda bwino kwambiri.
Chachinayi, kugwedezeka kodzipatula: kugwira ntchito bwino kwa "shock pad"
Kugwedezeka kwakunja ndi mdani wa kulondola kwa gawo loyenda bwino kwambiri la mpweya woyandama. Ngakhale kuti maziko a granite olondola ali ndi mphamvu yochepetsera kugwedezeka, kugwedezeka kwamphamvu kwambiri kungaphwanye malire ake a buffer. Kugwedezeka komwe kumachitika chifukwa cha magalimoto ozungulira fakitale ndi magwiridwe antchito a zida zazikulu zamakanika kumatumizidwa ku maziko a granite kudzera pansi, zomwe zingasokoneze kulondola kwa kayendedwe ka gawo loyenda bwino kwambiri la mpweya woyandama. Mu CMM yapamwamba, kugwedezeka kungayambitse kukhudzana pakati pa probe yoyezera ndi workpiece kuti kuyezedwe kusakhale kosakhazikika, zomwe zimapangitsa kuti deta yoyezera isinthe. Kuti tithetse vutoli, ndikofunikira kugwiritsa ntchito njira zodzipatula zogwedezeka, monga kuyika ma vibration isolation pads pamalo oyika zida, kumanga maziko odzipatula ogwedezeka, kapena kugwiritsa ntchito njira yodzipatula yogwedezeka kuti ichotse kugwedezeka kwakunja, ndikupanga malo ogwirira ntchito chete komanso okhazikika a maziko olondola a granite ndi gawo loyenda bwino kwambiri la mpweya woyandama.
Pokhapokha pokwaniritsa zofunikira zachilengedwe monga kutentha, chinyezi, ukhondo ndi kugwedezeka, maziko olondola a granite a gawo loyenda bwino kwambiri la mpweya woyandama angapereke phindu lonse ku magwiridwe ake, kupereka chitsimikizo chodalirika cha ntchito zolondola kwambiri m'magawo osiyanasiyana, ndikuthandiza makampaniwa kupita patsogolo pakupanga zinthu molondola kwambiri komanso kafukufuku wasayansi.
Nthawi yotumizira: Epulo-08-2025