M'munda wa zopangira zapamwamba komanso kafukufuku wasayansi wotsogola, gawo loyendetsa bwino kwambiri la float ya mpweya lakhala chida chofunikira kwambiri chogwirira ntchito bwino komanso kuyeza ndikuchita bwino kwambiri. Maziko olondola a granite, monga maziko othandizira, ali ndi zofunikira kwambiri pa malo ogwira ntchito, ndipo malo oyenerera a chilengedwe ndi maziko owonetsetsa kuti ntchito yake ikhale yokhazikika komanso zotsatira zake zabwino.
Choyamba, kutentha kutentha: mwatsatanetsatane "stabilizer"
Ngakhale granite imadziwika ndi kukhazikika kwake, sikutetezedwa kwathunthu ku kusintha kwa kutentha. Ngakhale kuti mphamvu yake yowonjezera kutentha imakhala yochepa, nthawi zambiri 5-7 × 10⁻⁶/℃, muzochitika zowonongeka kwambiri, kusinthasintha kwachidziwitso kwa kutentha kungayambitsebe kusintha kwa dimensional ndi kukhudza kulondola kwa module. M'malo opangira zida za semiconductor chip, njira ya lithography imafunikira kulondola kwa danami-level, ndipo kutentha kozungulira kumasinthasintha ndi 1 ° C, ndipo maziko a granite okhala ndi mbali ya mita imodzi amatha kukulitsa kukula kapena kutsika kwa ma microns 5-7. Kusintha kwakung'ono kumeneku kumafalitsidwa ndi gawo loyendetsa bwino kwambiri la kuyandama kwa mpweya, zomwe zimakwanira kupanga chip lithography pattern kupatuka ndikuchepetsa kwambiri zokolola. Choncho, okonzeka ndi lubwe mwatsatanetsatane m'munsi mwa mpweya akuyandama kopitilira muyeso zoyenda gawo, abwino ntchito chilengedwe kutentha ayenera kulamulidwa pa 20 ° C ± 1 ° C, mothandizidwa ndi mkulu-mwatsatanetsatane zonse zipangizo kutentha, monga nthawi zonse kutentha ndi chinyezi dongosolo mpweya woziziritsira, kuwunika mosalekeza ndi kusintha kwa kutentha yozungulira, kuonetsetsa kuti kutentha m'munsi kwambiri osiyanasiyana, kuonetsetsa kuti m'munsi kwambiri fluctu osiyanasiyana, kuonetsetsa kuti m'munsi kwambiri fluctu osiyanasiyana. ntchito yolondola kwambiri.
Chachiwiri, kasamalidwe ka chinyezi: chinsinsi cha chitetezo cha chinyezi "mwala"
Chinyezi ndi chinthu china chofunikira chomwe chimakhudza magwiridwe antchito a granite maziko. M'malo otentha kwambiri, granite ndi yosavuta kuyamwa nthunzi yamadzi, yomwe ingayambitse kusungunuka pamwamba, zomwe sizimangokhudza kukhazikika kwa kugwirizana kwa granite ndi gawo la Ultra-precision motion float, komanso kungayambitse kukokoloka kwa nthaka ndi kuchepetsa gloss ndi kulondola kwa nthawi yaitali. Mu optical mandala akupera msonkhano, ngati chinyezi ndi apamwamba kuposa 60% RH kwa nthawi yaitali, nthunzi madzi adsorbed pamwamba pa granite m'munsi kusokoneza kayendedwe ka mpweya zoyandama slider, kuti mandala akupera molondola yafupika, ndipo pamwamba ndi olakwika. Choncho, chinyezi chachibale cha malo ogwira ntchito chiyenera kuyendetsedwa mosamalitsa pakati pa 40% -60% RH, yomwe ingathe kuyang'aniridwa ndi kusinthidwa mu nthawi yeniyeni mwa kukhazikitsa zowonongeka, zowunikira chinyezi ndi zipangizo zina kuti zipewe kuwonongeka kwa granite m'munsi chifukwa cha chinyezi chachikulu, ndikuwonetsetsa kuti ultra-precision motion module yoyandama mpweya.
Chachitatu, chitsimikizo chaukhondo: "woyang'anira" wolondola
Kuwonongeka kwa tinthu tating'onoting'ono tomwe timakhala m'munsi mwa ultra-precision motion module of air flotation sikungatheke. Tikakhala tinthu tating'onoting'ono tomwe timayendetsa bwino kwambiri pakati pa gasi. Mumsonkhano wopangira makina olondola kwambiri a mbali zakuthambo, ngati tinthu tating'onoting'ono tamlengalenga tigwera pamiyala ya granite, njira yoyenda ya chida cha makina imatha kupatutsidwa, kusokoneza kulondola kwa magawowo. Choncho, malo ogwirira ntchito ayenera kukhala oyera kwambiri, kufika pa 10,000 kapena apamwamba kwambiri a ukhondo, kupyolera mu kuyika kwa zipangizo zoyeretsera mpweya, monga zosefera zapamwamba za mpweya (HEPA), zosefera fumbi mumlengalenga, panthawi imodzimodziyo, ogwira ntchito ayenera kuvala zovala zopanda fumbi, zophimba nsapato, ndi zina zotero, kuchepetsa fumbi lomwe limabweretsedwa ndi anthu. Sungani malo ogwirira ntchito olondola kwambiri a granite base ndi air float ultra-precision motion module.
Chachinayi, kudzipatula kwa vibration: kugwira ntchito bwino kwa "shock pad"
Kugwedezeka kwakunja ndi mdani wa kulondola kwa ultra-precision motion module ya float air. Ngakhale maziko olondola a granite ali ndi kuthekera kochepetsa kugwedezeka, kugwedezeka kwamphamvu kwambiri kumatha kuswabe malire ake. Kugwedezeka komwe kumapangidwa ndi magalimoto ozungulira fakitale ndikugwiritsa ntchito zida zazikulu zamakina zimatumizidwa ku maziko a granite kudzera pansi, zomwe zidzasokoneza kulondola kwamayendedwe a ultra-precision motion module ya air float. Pamapeto a CMM, kugwedezeka kungayambitse kukhudzana pakati pa probe yoyezera ndi chogwirira ntchito kuti chiyesedwe kukhala chosakhazikika, zomwe zimapangitsa kuti deta yoyezera iwonongeke. Pofuna kuthetsa vutoli, m'pofunika kutengera njira zodzipatula zogwedezeka, monga kuyala ziwiya zodzipatula zogwedezeka pamalo opangira zida, kumanga maziko osungunula a vibration, kapena kugwiritsa ntchito njira yodzipatula ya vibration kuti muthetse kugwedezeka kwakunja, ndikupanga malo ogwirira ntchito abata ndi okhazikika a granite mwatsatanetsatane ndi gawo loyendetsa mpweya.
Pokhapokha pokwaniritsa zofunikira za chilengedwe cha kutentha, chinyezi, ukhondo ndi kugwedezeka, maziko olondola a granite a ultra-precision motion module of the air float angapereke kusewera kwathunthu ku ubwino wake, kupereka chitsimikizo chodalirika cha machitidwe olondola kwambiri m'madera osiyanasiyana, ndikuthandizira makampani kuti apite kumalo apamwamba kwambiri opangira ndi kufufuza kwa sayansi.
Nthawi yotumiza: Apr-08-2025