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M'munda wa semiconductor kupanga, monga zida zapakati zomwe zimatsimikizira kulondola kwa njira yopangira chip, kukhazikika kwa chilengedwe chamkati cha makina a photolithography ndikofunikira kwambiri. Kuchokera pachisangalalo cha gwero lakuya kwambiri la ultraviolet mpaka kugwira ntchito kwa nsanja ya nanoscale precision motion, sipangakhale kupatuka pang'ono mu ulalo uliwonse. Maziko a granite, okhala ndi mndandanda wazinthu zapadera, amasonyeza ubwino wosayerekezeka poonetsetsa kuti makina a photolithography akugwira ntchito komanso kupititsa patsogolo kulondola kwa chithunzithunzi. pa
Kuchita bwino kwambiri kwa electromagnetic shielding
Mkati mwa makina a photolithography amadzazidwa ndi malo ovuta a electromagnetic. Electromagnetic interference (EMI) yopangidwa ndi zinthu monga magwero amphamvu a ultraviolet, ma mota oyendetsa, ndi magetsi othamanga kwambiri, ngati siziwongoleredwa bwino, zingakhudze kwambiri magwiridwe antchito a zida zamagetsi ndi makina owoneka bwino mkati mwa zida. Mwachitsanzo, kusokoneza kungayambitse kupatuka pang'ono pamapangidwe a photolithography. M'njira zopangira zapamwamba, izi ndi zokwanira kuti zitsogolere kulumikizana kolakwika kwa transistor pa chip, kuchepetsa kwambiri zokolola za chip. pa
Granite ndi chinthu chopanda chitsulo ndipo sichiyendetsa magetsi palokha. Palibe chodabwitsa cha electromagnetic induction chochitika chifukwa cha kuyenda kwa ma elekitironi aulere mkati monga muzinthu zachitsulo. Chikhalidwe ichi chimapangitsa kukhala thupi lachilengedwe loteteza ma elekitirodi, lomwe limatha kuletsa njira yotumizira kusokoneza kwamkati mwamagetsi. Pamene alternating maginito kwaiye ndi kunja electromagnetic kusokonezedwa gwero propagates ku maziko granite, popeza granite si maginito ndipo sangathe magnetized, ndi alternating maginito n'zovuta kulowa, potero kuteteza pachimake zigawo zikuluzikulu za makina photolithography anaika pa m'munsi, monga mwatsatanetsatane masensa ndi kuwala magalasi chikoka kusokoneza maginito kusintha zipangizo ndi maginito kuwala kusamutsa chitsanzo pa ndondomeko ya photolithography. pa
Kugwirizana kwabwino kwa vacuum
Chifukwa kuwala kwambiri kwa ultraviolet (EUV) kumatengedwa mosavuta ndi zinthu zonse, kuphatikiza mpweya, makina a EUV lithography ayenera kugwira ntchito pamalo opanda vacuum. Pakadali pano, kuyanjana kwa zida za zida ndi chilengedwe cha vacuum kumakhala kofunika kwambiri. Mu vacuum, zinthu zimatha kusungunuka, kusungunula ndikutulutsa mpweya. Mpweya wotulutsidwawo sikuti umangotenga kuwala kwa EUV, kumachepetsa kulimba komanso kufalikira kwa kuwalako, komanso kumatha kuyipitsa magalasi a kuwala. Mwachitsanzo, mpweya wamadzi ukhoza kutulutsa magalasi, ndipo ma hydrocarbons amatha kuyika zigawo za kaboni pamagalasi, zomwe zimakhudza kwambiri luso la kujambula. pa
Granite ili ndi mphamvu zokhazikika zamakemikolo ndipo satulutsa mpweya m'malo opanda vacuum. Malinga ndi kuyezetsa kwa akatswiri, m'malo opangira makina opukutira azithunzi (monga malo oyeretsera kwambiri oyeretsera momwe mawonekedwe owunikira komanso mawonekedwe owonera mchipinda chachikulu amakhala, omwe amafunikira H₂O <10⁻⁵ Pa, CₓHᵧ <10⁻ kutsika kwambiri, kutsika kwapatali kwambiri, kutsika kwapang'ono kwambiri. kuposa zinthu zina monga zitsulo. Izi zimathandiza kuti mkati mwa makina a photolithography kukhalabe ndi digiri yapamwamba ya vacuum ndi ukhondo kwa nthawi yaitali, kuonetsetsa kuti kuwala kwa EUV kumadutsa kwambiri panthawi yopatsirana komanso malo ogwiritsira ntchito magalasi owala kwambiri, kukulitsa moyo wautumiki wa makina opangira kuwala, ndi kupititsa patsogolo ntchito yonse ya makina a photolithography. pa
Kukana kwamphamvu kugwedezeka komanso kukhazikika kwamafuta
Pa ndondomeko ya photolithography, kulondola pa mlingo wa nanometer kumafuna kuti makina a photolithography asakhale ndi kugwedezeka pang'ono kapena kutentha kwa kutentha. Kugwedezeka kwa chilengedwe komwe kumapangidwa ndi ntchito ya zida zina ndi kayendetsedwe ka ogwira ntchito pamsonkhanowu, komanso kutentha komwe kumapangidwa ndi makina a photolithography pawokha pakugwira ntchito, zonsezi zikhoza kusokoneza kulondola kwa photolithography. Granite ili ndi kachulukidwe kwambiri komanso mawonekedwe olimba, ndipo imakhala ndi kukana kugwedezeka kwabwino. Kapangidwe kake kamkati ka kristalo kakang'ono kamene kamapangidwira, komwe kumatha kuchepetsa mphamvu yakugwedezeka ndikupondereza kufalikira kwa vibration. Deta yoyesera ikuwonetsa kuti pansi pa gwero lomwelo la vibration, maziko a granite amatha kuchepetsa kugwedezeka kwa matalikidwe opitilira 90% mkati mwa masekondi 0.5. Poyerekeza ndi maziko achitsulo, amatha kubwezeretsa zipangizo kuti zikhazikike mofulumira, kuonetsetsa kuti pali malo enieni pakati pa photolithography lens ndi wafer, ndikupewa kusokonezeka kwa chitsanzo kapena kusokonezeka chifukwa cha kugwedezeka. pa
Pakalipano, coefficient of thermal expansion of granite ndi yochepa kwambiri, pafupifupi (4-8) × 10⁻⁶/℃, yomwe imakhala yochepa kwambiri kuposa yazitsulo zachitsulo. Panthawi yogwiritsira ntchito makina a photolithography, ngakhale kutentha kwa mkati kumasinthasintha chifukwa cha zinthu monga kutentha kwa kutentha kuchokera ku kuwala ndi kukangana ndi zigawo zamakina, maziko a granite amatha kukhala okhazikika ndipo sangawonongeke kwambiri chifukwa cha kuwonjezereka kwa kutentha ndi kutsika. Amapereka chithandizo chokhazikika komanso chodalirika cha optical system ndi ndondomeko yoyendetsera bwino, kusunga kugwirizana kwa photolithography yolondola.
Nthawi yotumiza: May-20-2025