Pakupanga semiconductor, makina a photolithography ndi chida chofunikira kwambiri chomwe chimatsimikizira kulondola kwa tchipisi, ndipo maziko a granite, okhala ndi mawonekedwe ake angapo, akhala gawo lofunikira kwambiri pamakina a Photolithography.
Kukhazikika kwamafuta: "Chishango" motsutsana ndi Kusintha kwa Kutentha
Makina a photolithography akamagwira ntchito, amapanga kutentha kwakukulu. Ngakhale kusinthasintha kwa kutentha kwa 0.1 ℃ kokha kungayambitse kusinthika kwa zida za zida ndikukhudza kulondola kwa chithunzithunzi. Coefficient of thermal expansion of granite ndi yotsika kwambiri, 4-8 × 10⁻⁶/℃ yokha, yomwe ili pafupifupi 1/3 ya chitsulo ndi 1/5 ya aluminium alloy. Izi zimathandiza kuti maziko a granite akhalebe okhazikika pamene makina a photolithography akugwira ntchito kwa nthawi yaitali kapena pamene kutentha kwa chilengedwe kumasintha, kuwonetsetsa kuyika bwino kwa zigawo za kuwala ndi makina opangira makina.
Super anti-vibration performance: "Siponji" yomwe imayamwa kugwedezeka
Mu fakitale ya semiconductor, kugwiritsa ntchito zida zozungulira komanso kuyenda kwa anthu kumatha kupanga kugwedezeka. Granite ili ndi kachulukidwe kwambiri komanso mawonekedwe olimba, ndipo imakhala ndi zinthu zabwino kwambiri zochepetsera, ndi chiŵerengero chonyowa 2 mpaka 5 kuposa zitsulo. Pamene kugwedezeka kwakunja kumatumizidwa ku maziko a granite, kukangana pakati pa makristasi amkati amkati kumasintha mphamvu yogwedezeka kukhala mphamvu ya kutentha kuti iwonongeke, yomwe imatha kuchepetsa kwambiri kugwedezeka kwa nthawi yochepa, kulola makina a photolithography kuti abwezeretse kukhazikika ndikupewa kusokoneza kapena kusokoneza chitsanzo cha photolithography chifukwa cha kugwedezeka.
Kukhazikika kwa Chemical: "Woyang'anira" Malo Oyera
Mkati mwa makina a photolithography amakumana ndi mitundu yosiyanasiyana yamankhwala, ndipo zida zachitsulo wamba zimatha kuwonongeka kapena kutulutsa tinthu. Granite imapangidwa ndi mchere monga quartz ndi feldspar. Lili ndi mankhwala okhazikika komanso kukana kwamphamvu kwa dzimbiri. Pambuyo poviikidwa mu asidi ndi mankhwala a alkali, dzimbiri la pamwamba ndilochepa kwambiri. Pakadali pano, mawonekedwe ake owundana amatulutsa zinyalala kapena fumbi, zomwe zimakwaniritsa zofunikira pazipinda zoyeretsera komanso kuchepetsa chiwopsezo cha kuipitsidwa.
Kusintha kosinthika: "Zinthu zabwino" zopangira ma benchmarks enieni
Zigawo zazikuluzikulu za makina a photolithography ziyenera kuikidwa pamtunda wapamwamba kwambiri. Mapangidwe amkati a granite ndi ofanana ndipo ndi osavuta kukonzedwa kuti akhale olondola kwambiri kudzera mukupera, kupukuta ndi njira zina. Kutsika kwake kumatha kufika ≤0.5μm/m, ndipo pamwamba pa roughness Ra ndi ≤0.05μm, kupereka maziko enieni oyika zigawo monga ma lens optical.
Utali wautali komanso wopanda kukonza: "Zida zakuthwa" zochepetsera mtengo
Poyerekeza ndi zida zachitsulo zomwe zimakonda kutopa komanso kusweka pakugwiritsa ntchito kwa nthawi yayitali, granite sakhala ndi mapindikidwe apulasitiki kapena kusweka pansi pa katundu wamba, ndipo safuna chithandizo chapamwamba, motero amapewa chiopsezo cha ❖ kuyanika ndi kuipitsidwa. Muzochita zogwiritsidwa ntchito, zitagwiritsidwa ntchito kwa zaka zambiri, zizindikiro zazikulu za ntchito ya granite zikhoza kukhalabe zokhazikika, kuchepetsa ntchito ndi kukonza ndalama za zipangizo.
Kuchokera kukhazikika kwa kutentha, kugwedezeka kwa kugwedezeka kwa mankhwala, makhalidwe angapo a granite maziko amakwaniritsa bwino zofunikira za makina a photolithography. Pamene njira yopangira tchipisi ikupitilira kukhala yolondola kwambiri, maziko a granite apitiliza kugwira ntchito yosasinthika pakupanga ma semiconductor.
Nthawi yotumiza: May-20-2025