Mu msonkhano wopanga ma semiconductor, zofunika pakupanga tchipisi pazachilengedwe komanso kulondola kwa zida ndizonyanyira, ndipo kupatuka kulikonse kungayambitse kuchepa kwakukulu kwa zokolola za chip. XYZT precision gantry movement platform imadalira zigawo za granite kuti zigwirizane ndi mbali zina za nsanja kuti apange maziko olimba kuti akwaniritse kulondola kwa nanoscale.
Wabwino kugwedera kutsekereza katundu
M'magawo opangira semiconductor, kugwiritsa ntchito zida zotumphukira ndi ogwira ntchito oyenda mozungulira angayambitse kugwedezeka. Mapangidwe amkati a zigawo za granite ndi wandiweyani komanso yunifolomu, okhala ndi mawonekedwe achilengedwe akunyowa kwambiri, ngati "chotchinga" chogwedezeka bwino. Pamene kugwedezeka kwakunja kumaperekedwa ku nsanja ya XYZT, chigawo cha granite chimatha kuchepetsa mphamvu zoposa 80% ya mphamvu yogwedeza ndikuchepetsa kusokoneza kwa kugwedezeka pa nsanja yolondola. Panthawi imodzimodziyo, nsanjayi imakhala ndi ndondomeko yoyendetsera bwino kwambiri ya air float, yomwe imagwira ntchito limodzi ndi zigawo za granite. Wowongolera mpweya woyandama amagwiritsa ntchito filimu yokhazikika ya gasi yopangidwa ndi mpweya wothamanga kwambiri kuti azindikire kuyimitsidwa kopanda kulumikizana kwa magawo osuntha a nsanja ndikuchepetsa kugwedezeka kwakung'ono komwe kumachitika chifukwa cha kukangana kwamakina. Pamodzi, awiriwa amaonetsetsa kuti pulatifomu imakhazikika nthawi zonse pamlingo wa nanometer m'njira zazikulu monga chip lithography ndi etching, ndikupewa kupatuka kwa mawonekedwe a chip obwera chifukwa cha kugwedezeka.
Kukhazikika kwabwino kwamafuta
Kusinthasintha kwa kutentha ndi chinyezi mumsonkhanowu kumakhudza kwambiri kulondola kwa zida zopangira chip. Kukula kwamafuta a granite ndikotsika kwambiri, nthawi zambiri mu 5-7 × 10⁻⁶/℃, kukula kwake kumakhala kosasinthika kutentha kumasintha. Ngakhale kusiyana kwa kutentha pakati pa usana ndi usiku mu msonkhano kapena kupanga kutentha kwa zipangizo kumapangitsa kuti kutentha kwapakati kusinthe, zigawo za granite zimatha kukhala zokhazikika kuti zisawonongeke nsanja chifukwa cha kuwonjezereka kwa kutentha ndi kutsika. Pa nthawi yomweyo, wanzeru dongosolo kutentha kulamulira okonzeka ndi nsanja oyang'anira kutentha yozungulira mu nthawi yeniyeni, basi amasintha mpweya ndi kutentha dissipation zida, ndipo amasunga msonkhano kutentha pa 20 ° C ± 1 ° C. Kuphatikiza ndi ubwino wa kukhazikika kwachisangalalo kutentha, kuonetsetsa kuti nsanja mu ntchito yaitali, ndi kayendedwe ka zolondola ndixisnometer nthawi zonse kuonetsetsa zolondola Chip naxisnometer nthawi zonse kuonetsetsa kulondola Chip naxisnometer. Chip lithography chitsanzo kukula ndi zolondola, etching kuya ndi yunifolomu.
Kukwaniritsa zosowa za malo aukhondo
Sitolo yopanga semiconductor iyenera kukhala yaukhondo wambiri kuti tipewe fumbi kuti lisaipitse chip. Zida za granite zokha sizimapanga fumbi, ndipo pamwamba pake ndi yosalala, osati zosavuta kuyamwa fumbi. Pulatifomu yonse imatenga mawonekedwe otsekedwa kwathunthu kapena otsekedwa kuti achepetse kulowa kwa fumbi lakunja. Njira yoyendetsera mpweya wamkati imagwirizanitsidwa ndi dongosolo la mpweya woyera la msonkhanowo kuti zitsimikizire kuti ukhondo wamkati wamkati umafika pamlingo wofunikira ndi kupanga chip. Mu chilengedwe choyera ichi, zigawo za granite sizingakhudze ntchito chifukwa cha kukokoloka kwa fumbi, ndipo zigawo zikuluzikulu monga masensa apamwamba kwambiri ndi ma motors a nsanja amathanso kugwira ntchito mokhazikika, kupereka chitsimikiziro chotsimikizirika chokhazikika cha nanoscale cholondola pakupanga chip, ndikuthandizira makampani a semiconductor kuti apite ku mlingo wapamwamba wa ndondomeko.
Nthawi yotumiza: Apr-14-2025