Nsanja ya granite yoperekedwa ku zipinda zoyera: Palibe kutulutsidwa kwa ayoni yachitsulo, chisankho chabwino kwambiri pazida zowunikira ma wafer.

Mu gawo la kuyang'anira ma wafer a semiconductor, kuyera kwa malo oyeretsera kumagwirizana mwachindunji ndi kuchuluka kwa zinthu zomwe zimapangidwa. Pamene njira zopangira ma chip zikupitilira kukwera, zofunikira pa nsanja zonyamulira zida zodziwira zikukhala zovuta kwambiri. Mapulatifomu a granite, omwe ali ndi mawonekedwe osatulutsa ma ion achitsulo komanso kuipitsidwa pang'ono kwa tinthu tating'onoting'ono, aposa zipangizo zachikhalidwe zosapanga dzimbiri ndipo akhala njira yabwino kwambiri yogwiritsira ntchito zida zowunikira ma wafer.

Granite ndi mwala wachilengedwe wopangidwa makamaka ndi mchere wosakhala wachitsulo monga quartz, feldspar ndi mica. Khalidweli limaupatsa mwayi woti chitsulo chisatuluke ma ion. Mosiyana ndi zimenezi, chitsulo chosapanga dzimbiri, monga alloy ya zitsulo monga chitsulo, chromium ndi nickel, chimakhala ndi dzimbiri la electrochemical pamwamba pake chifukwa cha kuwonongeka kwa nthunzi ya madzi ndi mpweya wa acidic kapena alkaline m'chipinda choyera, zomwe zimapangitsa kuti ma ion achitsulo monga Fe²⁺ ndi Cr³⁺ atuluke. Ma ion ang'onoang'ono awa akangolumikizana pamwamba pa wafer, amasintha mphamvu zamagetsi za zinthu za semiconductor m'njira zotsatirazi monga photolithography ndi etching, zimayambitsa kusuntha kwa mphamvu ya transistor, komanso kumabweretsa ma short circuits mu dera. Deta yoyesera ya akatswiri ikuwonetsa kuti pambuyo poti nsanja ya granite iwonetsedwe nthawi zonse ku malo oyeretsera kutentha kwa chipinda ndi chinyezi (23±0.5℃, 45%±5% RH) kwa maola 1000, kutulutsidwa kwa ma ion achitsulo kunali kotsika kuposa malire ozindikira (< 0.1ppb). Chiwopsezo cha ma wafers omwe amayamba chifukwa cha kuipitsidwa kwa ayoni achitsulo pogwiritsa ntchito nsanja zachitsulo zosapanga dzimbiri chikhoza kufika pa 15% mpaka 20%.

Ponena za kuletsa kuipitsidwa kwa tinthu tating'onoting'ono, nsanja za granite zimagwiranso ntchito bwino kwambiri. Zipinda zotsukira zili ndi zofunikira kwambiri pa kuchuluka kwa tinthu tating'onoting'ono tomwe timapachikidwa mumlengalenga. Mwachitsanzo, m'zipinda zotsukira za ISO Class 1, kuchuluka kwa tinthu tating'onoting'ono ta 0.1μm komwe kumaloledwa pa mita imodzi ya kiyubiki sikupitirira 10. Ngakhale nsanja yachitsulo chosapanga dzimbiri yachitidwapo kupukuta, ikhoza kupanga zinyalala zachitsulo kapena sikelo ya oxide yomwe imachotsedwa chifukwa cha mphamvu zakunja monga kugwedezeka kwa zida ndi kugwira ntchito kwa ogwira ntchito, zomwe zingasokoneze njira yowunikira kapena kukanda pamwamba pa wafer. Mapulatifomu a granite, okhala ndi kapangidwe kake kolimba ka mchere (kachulukidwe ≥2.7g/cm³) komanso kuuma kwambiri (6-7 pa sikelo ya Mohs), sachedwa kuwonongeka kapena kusweka akagwiritsidwa ntchito kwa nthawi yayitali. Miyeso yoyezedwa ikuwonetsa kuti imatha kuchepetsa kuchuluka kwa tinthu tating'onoting'ono tomwe timapachikidwa mumlengalenga m'dera la zida zodziwira ndi zoposa 40% poyerekeza ndi nsanja zachitsulo chosapanga dzimbiri, ndikusunga bwino miyezo ya kalasi ya chipinda chotsukira.

Kuwonjezera pa makhalidwe ake oyera, magwiridwe antchito a granite amaposa kwambiri chitsulo chosapanga dzimbiri. Ponena za kukhazikika kwa kutentha, kuchuluka kwake kwa kutentha ndi (4-8) × 10⁻⁶/℃, kochepera theka la chitsulo chosapanga dzimbiri (pafupifupi 17×10⁻⁶/℃), zomwe zimatha kusunga bwino malo olondola a zida zodziwira pamene kutentha m'chipinda choyera kusinthasintha. Khalidwe lapamwamba la damping (damping ratio > 0.05) lingathe kuchepetsa kugwedezeka kwa zida ndikuletsa probe yodziwira kugwedezeka. Kukana kwake dzimbiri kwachilengedwe kumathandizira kuti ikhale yokhazikika ngakhale ikakumana ndi zosungunulira za photoresist, mpweya wochotsa ndi mankhwala ena popanda kufunikira chitetezo chowonjezera cha kupaka.

Pakadali pano, nsanja za granite zimagwiritsidwa ntchito kwambiri m'mafakitale opanga ma wafer apamwamba. Deta ikuwonetsa kuti atagwiritsa ntchito nsanja ya granite, kuchuluka kwa kuzindikira tinthu ta wafer pamwamba kwatsika ndi 60%, nthawi yowerengera zida yawonjezeka katatu, ndipo mtengo wonse wopanga watsika ndi 25%. Pamene makampani opanga ma semiconductor akupita patsogolo kwambiri, nsanja za granite, zomwe zili ndi zabwino zake zazikulu monga kutulutsidwa kwa ion yachitsulo komanso kuipitsidwa pang'ono kwa tinthu, zipitiliza kupereka chithandizo chokhazikika komanso chodalirika pakuwunika ma wafer, kukhala mphamvu yofunika kwambiri yomwe ikuyendetsa patsogolo makampaniwa.