Mapulatifomu olondola a granite, okhala ndi kukhazikika kwawo kwakukulu, kukulitsa kocheperako, magwiridwe antchito abwino kwambiri komanso zinthu zachilengedwe zotsutsana ndi maginito, ali ndi phindu losasinthika m'magawo apamwamba opangira ndi kafukufuku wasayansi komwe kulondola ndi kukhazikika kumafunidwa kwambiri. Zotsatirazi ndi zochitika zake zogwiritsira ntchito komanso ubwino wake:
I. Munda wa Ultra-precision processing equipment
Zida zopangira semiconductor
Zochitika zogwiritsira ntchito: Lithography makina workpiece tebulo, wafer dicing makina m'munsi, ma CD poyika nsanja.
Mtengo waukadaulo:
Coefficient of thermal expansion of granite ndi (0.5-1.0) × 10⁻⁶/℃, yomwe imatha kukana kusinthasintha kwa kutentha panthawi ya mawonekedwe a nanoscale ya makina a lithography (cholakwika cha kusamuka <0.1nm m'malo a ± 0.1℃).
Mapangidwe amkati ang'onoang'ono a pore amapanga chiwopsezo chachilengedwe (chiŵerengero cha damping 0.05 mpaka 0.1), kupondereza kugwedezeka (matalikidwe <2μm) panthawi yodula kwambiri ndi makina odulira ndikuwonetsetsa kuti m'mphepete mwa roughness Ra wa wafer kudula ndi osachepera 1μm.
2. Makina Ogaya Olondola ndi Makina Oyezera (CMM)
Mlandu wofunsira:
Pansi pa makina atatu oyezera ogwirizanitsa amatengera kapangidwe ka granite kofunikira, kokhala ndi kusalala kwa ± 0.5μm/m. Kuphatikizidwa ndi njanji yoyandama ya mpweya, imakwaniritsa kulondola kwa nano-level (kubwereza kulondola kwa malo ± 0.1μm).
The worktable ya makina kuwala akupera amatengera gulu gulu la granite ndi siliva zitsulo. Mukakupera magalasi a K9, mawonekedwe a pamwamba amakhala ochepera λ/20 (λ=632.8nm), kukwaniritsa zofunika pakukonza magalasi a laser.
Ii. Munda wa Optics ndi Photonics
Ma telescope a zakuthambo ndi makina a laser
Mapulogalamu odziwika:
Pulatifomu yothandizira yowonetsera pamwamba pa telesikopu yayikulu yawayilesi imatengera kapangidwe kachisa ka granite, komwe kamakhala kopepuka podzilemera (kachulukidwe 2.7g/cm³) ndipo imakhala yolimba kugwedezeka kwamphepo (mapindikidwe <50μm pansi pa mphepo yamlingo wa 10).
Pulatifomu ya laser interferometer imagwiritsa ntchito granite yaying'ono. Chowonetseracho chimakonzedwa ndi vacuum adsorption, ndi zolakwika za flatness zosakwana 5nm, kuonetsetsa kukhazikika kwa kuyesera kowoneka bwino kwambiri monga kudziwika kwa mafunde amphamvu.
2. Mwatsatanetsatane kuwala chigawo processing
Ubwino waukadaulo:
Kuthekera kwa maginito ndi kutulutsa kwamagetsi papulatifomu ya granite kuli pafupi ndi ziro, kupewetsa kusokoneza kwa ma elekitiroma panjira zolondola monga kupukuta kwa ion beam (IBF) ndi kupukuta kwa magnetorheological (MRF). Kuwona kwapamwamba kwa mawonekedwe a PV a mandala opangidwa ndi asphical amatha kufika λ/100.
Iii. Kuwunika kwa Zamlengalenga ndi Kulondola
Njira yowunikira gawo la ndege
Zochitika zogwiritsira ntchito: Kuyang'ana kwamitundu itatu kwa masamba a ndege, kuyeza kwa mawonekedwe ndi kulolerana kwa magawo amtundu wa aluminiyamu aloyi.
Kuchita kwakukulu:
Pamwamba pa nsanja ya granite imathandizidwa ndi corrosion electrolytic kupanga mapangidwe abwino (okhala ndi roughness ya Ra 0.4-0.8μm), oyenerera ma probes oyendetsa bwino kwambiri, ndipo cholakwika chodziwira mbiri ya tsamba ndi osachepera 5μm.
Ikhoza kupirira katundu woposa 200kg wa zigawo za ndege, ndipo kusintha kwa flatness pambuyo pa kugwiritsidwa ntchito kwa nthawi yaitali kumakhala kosakwana 2μm/m, kukwaniritsa zofunikira zosamalira bwino za Giredi 10 mumakampani opanga ndege.
2. Kuwongolera kwa magawo oyenda mopanda mphamvu
Zofunikira paukadaulo: Kuwongolera mosasunthika kwa zida zopanda mphamvu monga ma gyroscopes ndi ma accelerometers kumafuna pulatifomu yokhazikika kwambiri.
Yankho: Pulatifomu ya granite imaphatikizidwa ndi njira yodzipatula yokhazikika ya kugwedezeka (mafupipafupi achilengedwe <1Hz), kukwaniritsa kusinthasintha kwapamwamba kwa zero-offset kukhazikika kwa zigawo zopanda mphamvu <0.01 ° / h m'malo okhala ndi kuthamanga kwa vibration <1 × 10⁻⁴g.
Iv. Nanotechnology ndi Biomedicine
Kusanthula kwa microscope (SPM) nsanja
Ntchito yapakati: Monga maziko a atomic force microscopy (AFM) ndi scanning tunneling microscopy (STM), iyenera kukhala yosiyanitsidwa ndi kugwedezeka kwachilengedwe komanso kutengeka kwamafuta.
Zizindikiro zamachitidwe:
Pulatifomu ya granite, kuphatikiza ndi miyendo yodzipatula ya pneumatic vibration, imatha kuchepetsa kufalikira kwa kugwedezeka kwakunja (1-100Hz) mpaka kuchepera 5%, kukwaniritsa chithunzithunzi cha mulingo wa atomiki wa AFM m'malo amlengalenga (kutsimikiza <0.1nm).
The tilinazo kutentha ndi zosakwana 0.05μm/℃, amene amakwaniritsa zofunika kuonerera nanoscale zitsanzo zamoyo mu kutentha zonse (37 ℃ ± 0.1 ℃) chilengedwe.
2. Zida zopangira biochip
Mlandu wa ntchito: Pulatifomu yolondola kwambiri ya tchipisi ta DNA imatengera njanji zoyandama za granite, zokhala ndi malo olondola a ± 0.5μm, kuwonetsetsa kulumikizana kwa ma micron pakati pa njira ya microfluidic ndi electrode yozindikira.
V. Zochitika Zantchito Zotuluka
Zida zamakompyuta za Quantum
Zovuta zaukadaulo: Kusintha kwa Qubit kumafuna kutentha kotsika kwambiri (mK level) komanso malo amakina okhazikika kwambiri.
Yankho: The otsika kwambiri matenthedwe kufutukula katundu wa granite (kukulitsa mlingo <1ppm kuchokera -200 ℃ mpaka firiji) angafanane ndi mikoka makhalidwe kopitilira muyeso-otsika kutentha maginito superconducting, kuonetsetsa kulondola kulondola pa ma CD tchipisi quantum.
2. Electron Beam Lithography (EBL) dongosolo
Ntchito yofunikira: Katundu wotsekera wa nsanja ya granite (resistivity> 10¹³Ω · m) imalepheretsa kufalikira kwa ma elekitironi. Kuphatikizidwa ndi electrostatic spindle drive, imakwaniritsa zolemba zolondola kwambiri za lithography ndi m'lifupi wa mzere wa nanoscale (<10nm).
Chidule
Kugwiritsiridwa ntchito kwa nsanja zolondola za granite kwachokera pamakina olondola kwambiri mpaka kumadera otsogola monga nanotechnology, quantum physics, ndi biomedicine. Kupikisana kwake kwakukulu kwagona pakuphatikizana kwakukulu kwa zinthu zakuthupi ndi zofunikira za uinjiniya. M'tsogolomu, ndi kuphatikizika kwa matekinoloje olimbikitsira (monga ma graphene-granite nanocomposites) ndi matekinoloje anzeru ozindikira, nsanja za granite zidzadutsa molunjika pamlingo wa atomiki, kukhazikika kwa kutentha kwathunthu, komanso kuphatikizika koyambira kwamitundu ingapo, kumathandizira m'badwo wotsatira.
Nthawi yotumiza: May-28-2025