Mu unyolo wolondola wa kupanga ma semiconductor, makina osamutsira ma wafer ali ngati "njira yopezera ma chip", ndipo kukhazikika kwake ndi kulondola kwake zimatsimikiza mwachindunji kuchuluka kwa ma chip. Mbadwo watsopano wa makina osamutsira ma wafer umaphatikiza ma linear motors ndi maziko a granite, ndipo ubwino wapadera wa zinthu za granite ndiye mfundo yayikulu yotsegulira ma transmission apamwamba.
Maziko a granite: Kupanga "maziko olimba ngati miyala" kuti pakhale magetsi okhazikika
Granite, yomwe yakhala ikukonzedwa bwino kwa zaka mazana ambiri, ili ndi mchere wochuluka komanso wofanana mkati mwake. Khalidwe lachilengedweli limapangitsa kuti ikhale chinthu choyenera kwambiri chogwiritsira ntchito makina osamutsira ma wafer. M'malo ovuta a zipinda zotsukira za semiconductor, granite, yokhala ndi kuchuluka kochepa kwambiri kwa kutentha (5-7 × 10⁻⁶/℃ yokha), imatha kukana kutentha komwe kumapangidwa panthawi yogwiritsa ntchito zida komanso kusintha kwa kutentha kwa chilengedwe, kuonetsetsa kuti kukula kwa maziko kumakhala kokhazikika ndikupewa kupotoka kwa njira yotumizira chifukwa cha kusintha kwa kutentha. Kugwira ntchito kwake kodabwitsa kwa kugwedezeka kumatha kuyamwa mwachangu kugwedezeka kwa makina komwe kumapangidwa panthawi yoyambitsa, kuzimitsa ndi kuthamangitsa ma linear motors, komanso kusokoneza kwakunja komwe kumachitika chifukwa cha magwiridwe antchito a zida zina mu workshop, kupereka nsanja yokhazikika yokhala ndi "zero shake" yotumizira ma wafer.
Pakadali pano, kukhazikika kwa mankhwala a granite kumaonetsetsa kuti sakuwononga kapena kuchita dzimbiri m'malo ochitira zinthu za semiconductor komwe ma reagents a asidi ndi alkali amasinthasintha ndipo pamafunika ukhondo wambiri, motero kupewa kulondola kwa kufalikira kwa zinthu chifukwa cha ukalamba kapena kunyowa kwa zinthu zodetsa. Makhalidwe osalala komanso okhuthala pamwamba amatha kuchepetsa bwino kumatirira kwa fumbi, kukwaniritsa miyezo yokhwima yopanda fumbi m'zipinda zoyera ndikuchotsa chiopsezo cha kuipitsidwa kwa wafer kuchokera ku mizu.
Zotsatira za "mgwirizano wagolide" wa ma linear motors ndi granite
Ma mota a Linear, omwe ali ndi mawonekedwe osalola kuti magetsi azitha kuyenda bwino, kuthamanga kwambiri komanso liwiro loyankha kwambiri, amatumiza magetsi a endow wafer ndi ubwino wa "mwachangu, molondola komanso mokhazikika". Maziko a granite amapereka nsanja yochirikiza yolimba komanso yodalirika. Awiriwa amagwira ntchito limodzi kuti akwaniritse magwiridwe antchito. Pamene mota ya Linear imayendetsa chonyamulira cha wafer kuti chiziyenda panjira ya granite base, kulimba kwamphamvu ndi kukhazikika kwa maziko kumatsimikizira kuti mphamvu yoyendetsera injini imayendetsedwa bwino, kupewa kutayika kwa mphamvu kapena kuchedwa kwa magetsi chifukwa cha kusintha kwa maziko.
Chifukwa cha kufunikira kwa nanoscale molondola, ma linear motors amatha kukwaniritsa kulamulira kusamuka kwa sub-micron-level. Makhalidwe olondola kwambiri a granite bases (okhala ndi zolakwika za flatness zomwe zimayendetsedwa mkati mwa ±1μm) amagwirizana bwino ndi kuwongolera kolondola kwa ma linear motors, kuonetsetsa kuti cholakwika choyimilira panthawi yotumiza wafer ndi chochepera ±5μm. Kaya ndi shuttling yothamanga kwambiri pakati pa zida zosiyanasiyana zoyendetsera kapena malo oimika magalimoto olondola kuti ma wafer aperekedwe, kuphatikiza kwa ma linear motors ndi ma granite bases kungatsimikizire kuti "zero deviation and zero jitter" mu kutumiza wafer.
Kutsimikizira machitidwe amakampani: Kuwongolera kawiri pakugwira ntchito bwino komanso kuchuluka kwa zokolola
Pambuyo pokonza njira yake yosamutsira ma wafer, kampani yotsogola padziko lonse lapansi ya semiconductor idagwiritsa ntchito njira yothetsera ma wafer ndi granite base, yomwe idawonjezera mphamvu ya ma wafer ndi 40%, idachepetsa kuchuluka kwa zolakwika monga kugundana ndi kulephera panthawi yosamutsa ndi 85%, ndikukweza kuchuluka kwa ma chips ndi 6%. Kumbuyo kwa deta kuli chitsimikizo cha kukhazikika kwa ma transmission omwe amaperekedwa ndi granite base komanso mphamvu yolumikizana ya mota yolunjika, zomwe zimachepetsa kwambiri kutayika ndi zolakwika mu njira yotumizira ma wafer.
Kuyambira pa zinthu zakuthupi mpaka kupanga molondola, kuyambira pa ubwino wa magwiridwe antchito mpaka kutsimikizira kogwira ntchito, kuphatikiza kwa ma linear motors ndi maziko a granite kwasintha miyezo ya machitidwe osamutsira ma wafer. M'tsogolomu pamene ukadaulo wa semiconductor ukupita patsogolo ku njira za 3nm ndi 2nm, zipangizo za granite zidzapitirizabe kuyika chilimbikitso champhamvu pakukula kwa makampani ndi zabwino zake zosasinthika.
Nthawi yotumizira: Meyi-14-2025