Makampani opanga zinthu zamagetsi padziko lonse lapansi pakadali pano akuchita zinthu zambirimbiri zoyendera “Angstrom Era,” komwe miyeso ya transistor imayesedwa m'lifupi mwa maatomu ochepa chabe. Pamene lithography ndi zida zowunikira zikusintha kupita ku masikelo ang'onoang'ono awa, kufunikira kwa kukhazikika kwa kapangidwe kake kwasintha kuchoka pa “macro” kupita ku “nano.” Pakati pa kusinthaku pali chinthu chakale kwambiri monga Dziko Lapansi: Precision Granite.
Ngakhale kuti ambiri amaona granite ngati mwala wamba, pankhani yagawo loyika malo pang'onokapena njira yowunikira ya wafer yothamanga kwambiri, ndi ceramic yopangidwa mwaluso kwambiri. Kumvetsetsa kusiyana pakati pa zida zoyambira za metrology ndi nsanja zoyendera zapamwamba ndikofunikira kwa makampani opanga zinthu omwe akufuna kupititsa patsogolo zomwe zingatheke popanga silicon.
Granite CMM vs. Granite Surface Plate: Kumvetsetsa Kusintha kwa Uinjiniya
Mu malo ambiri owunikira khalidwe,Granite pamwamba mbalendi chinthu chogwiritsidwa ntchito paliponse—chizindikiro chodalirika komanso chopanda tsankho choyezera ndi manja. Komabe, pali malingaliro olakwika ambiri akuti mbale ya pamwamba ndi maziko a Granite CMM (Coordinate Measuring Machine) zimasinthasintha. Kuchokera ku lingaliro la uinjiniya, zikuyimira magawo awiri osiyana a zovuta.
Plate ya pamwamba imapangidwa kuti ikhale yokhazikika. Ntchito yake yayikulu ndikukhalabe yathyathyathya pansi pa katundu wosasuntha. Mosiyana ndi zimenezi, maziko a granite a CMM kapena gawo lolondola ayenera kuthana ndi katundu wosinthasintha. Pamene mlatho wa CMM ukuyenda kapena mota yolunjika ikufulumizitsa gawo la wafer pa ma G angapo, granite iyenera kukana osati kungopindika, komanso kugwedezeka ndi kumveka bwino kwa harmonic.
Mainjiniya a ZHHIMG amasankha makamaka "Black Granite" kuti igwiritsidwe ntchito mosinthasintha chifukwa cha kuchuluka kwake kwakukulu komanso kapangidwe kake ka tirigu wofewa. Ngakhale kuti mbale yodziwika bwino ya pamwamba ingagwiritse ntchito mitundu yofewa kwambiri, maziko a CMM amafunikira Young's Modulus yapamwamba kwambiri kuti atsimikizire kuti "kuchepa" kwa kayendedwe ka liwiro lalikulu sikukutanthauza kumveka kwa kapangidwe komwe kungawononge deta yoyezera.
Magawo Olondola Pakupanga Ma Semiconductor: Maziko a Zokolola
Mu kupanga zinthu za semiconductor, throughput ndi yield ndi zinthu ziwiri zofunika kwambiri. Zonsezi zimadalira mwachindunji magwiridwe antchito amagawo olondolaKaya ndi gawo la wafer mu makina a DUV/EUV lithography kapena makina oikira zinthu mu chida cha Automated Optical Inspection (AOI), zinthu zoyambira ziyenera kuthandiza kubwerezabwereza kwa sub-nanometer.
Vuto lalikulu pa nsalu ndi kutentha. Ma motors a linear ndi ma actuator amapanga mphamvu yotentha kwambiri. Ngati maziko a siteji apangidwa ndi aluminiyamu kapena chitsulo, kukulitsa kutentha komwe kumachitika kungapangitse kuti wafer isasunthike, zomwe zimapangitsa kuti "zolakwika zophimba" ziwononge magulu onse a tchipisi.
Kuchuluka kwa kutentha kwa Granite (CTE) komwe kumakhala kochepa kwambiri kumatsimikizira kuti ngakhale injini zikamatentha, "mapu" enieni a siteji amakhalabe ofanana. Kuphatikiza apo, ZHHIMG imapereka zigawo za granite zomwe zimapangidwa mwamakonda ndi njira zolumikizira mpweya. Chifukwa granite imatha kulumikizidwa ngati galasi, imagwira ntchito ngati malo abwino kwambiri olumikizirana ndi ma bearing a mpweya, zomwe zimathandiza kuti magawo "ayende" pa filimu yopyapyala ya mpweya yopanda kukangana komanso yopanda kukangana.
Fiziki ya Nanopositioning Stage Base
Tikalowa mu ufumu wagawo loyika malo pang'ono, tikulimbana ndi mayendedwe ang'onoang'ono kuposa tsitsi la munthu ndi chiwerengero cha 10,000. Pa mlingo uwu, kugwedezeka ndi mdani. Pansi wamba wa mafakitale amanjenjemera nthawi zonse chifukwa cha makina a HVAC, kuyenda kwa anthu oyenda pansi, ndi makina oyandikana nawo.
Granite imagwira ntchito ngati fyuluta yayikulu yotsika. Chifukwa cha kulemera kwake kwakukulu komanso kunyowa kwamkati kwambiri, mwachibadwa imayamwa kugwedezeka kwa ma frequency apamwamba isanafike pa masensa ofunikira kapena wafer yokha. "Kudzipatula kosachitapo kanthu" kumeneku ndi chifukwa chake ogulitsa otsogola padziko lonse lapansi amadalira ZHHIMG kuti ipereke maziko olemera komanso okhazikika pamagawo awo ogwirizana ndi vacuum. Granite yathu imakonzedwa mwapadera kuti isatuluke mpweya, zomwe zimapangitsa kuti ikhale yoyenera malo okhala ndi vacuum yambiri omwe amafunikira pa njira za electron-beam ndi EUV.
Kufika Pamalire: Ubwino wa ZHHIMG
Kusintha kuchoka pa mwala wosaphika kupita ku gawo la semiconductor-grade ndi ulendo woleza mtima kwambiri. Ngakhale kuti CNC grid imatifikitsa pafupi, giredi yomaliza ya "Super-Precision" imapezeka kudzera mu kulumikiza ndi manja. Iyi ndi njira yomwe akatswiri a ZHHIMG amagwiritsa ntchito ma phala okhwima ndi mayendedwe amanja kuti amete magawo a micron nthawi imodzi.
Kwagawo loyika malo pang'ono, kusalala sikofunikira kokha; kufanana ndi kupingasa kwa malo otsogolera ndizofunikira kwambiri. Malo athu amagwiritsa ntchito ma tracker a laser ndi milingo yamagetsi yokhala ndi ma resolution a 0.1 arc-seconds kuti atsimikizire kuti mzere uliwonse uli bwino. Mlingo uwu wa luso umatsimikizira kuti kasitomala akamayika ma linear motors ndi ma encoders awo, maziko a makina amakhala pafupi "angwiro" monga momwe fizikisi imaloleza.
Kutsimikizira Zamtsogolo Zabwino
Pamene makampani akupita ku ma node a 2nm ndi kupitirira apo, zofunikira kuti zinthu zikhale zoyera komanso zokhazikika zidzawonjezeka. Kuphatikiza kwa granite ndi zipangizo zina zapamwamba—monga milatho ya carbon fiber kapena ma ceramic vacuum chucks—ndiye malire otsatira pakulamulira kuyenda.
ZHHIMG ikudziperekabe kukhala yoposa kungopereka zinthu; ndife ogwirizana nawo mu unyolo wapadziko lonse lapansi wa semiconductor supply. Mwa kupereka maziko olimba kwambiri ofunikira pa mibadwo yotsatira ya magawo olondola, tikuthandiza kupanga makina omwe amamanga tsogolo.
Nthawi yotumizira: Feb-02-2026