Kodi Granite imagwiritsidwa ntchito bwanji mu zida zopangira wafer?

Granite ndi chinthu chodziwika bwino mumakampani opanga ma wafer chifukwa cha mphamvu zake zapadera zamakaniko komanso kulimba kwake. Ndi mwala wachilengedwe womwe umakumbidwa kuchokera ku miyala padziko lonse lapansi ndipo wakhala ukugwiritsidwa ntchito kwa zaka mazana ambiri pa ntchito zosiyanasiyana zomanga, kuphatikizapo kupanga zida za semiconductor. M'nkhaniyi, tikambirana za makhalidwe a granite ndi ntchito zake zosiyanasiyana pazida zopangira ma wafer.

Katundu wa Granite

Granite ndi mwala wa igneous womwe umapangidwa ndi mica, feldspar, ndi quartz. Umadziwika ndi mphamvu zake zapadera, kuuma kwake, komanso kulimba kwake, zomwe zimapangitsa kuti ukhale chinthu choyenera kugwiritsidwa ntchito chomwe chimafuna kulondola kwambiri komanso kulondola. Granite ili ndi coefficient yochepa ya kutentha, zomwe zikutanthauza kuti siimakula kapena kufooka chifukwa cha kusintha kwa kutentha, zomwe zimapangitsa kuti ikhale yokhazikika kwambiri. Kuphatikiza apo, granite imalimbana ndi dzimbiri ndi mankhwala, zomwe zimapangitsa kuti ikhale chinthu choyenera kugwiritsidwa ntchito m'malo ovuta.

Kugwiritsa Ntchito Granite mu Zida Zopangira Wafer

Granite ndi chinthu chomwe chimagwiritsidwa ntchito kwambiri mumakampani opanga ma wafer chifukwa cha kuphatikiza kwake kwapadera kwa zinthu. Izi ndi zina mwazomwe granite imagwiritsidwa ntchito pazida zopangira ma wafer:

1. Zida za Metrology

Granite imagwiritsidwa ntchito kwambiri popanga zida zoyezera zinthu, monga makina oyezera zinthu (CMMs) ndi makina oyezera zinthu owoneka bwino. Zida zimenezi zimafuna malo okhazikika omwe amatha kupirira kugwedezeka ndi kutentha. Kulimba kwambiri komanso kutentha kochepa kwa granite kumapangitsa kuti ikhale chinthu choyenera kugwiritsidwa ntchito motere.

2. Ma Wafer Chucks

Ma wafer chucks amagwiritsidwa ntchito posungira ma wafer panthawi yopanga. Ma wafer chucks amenewa amafunika malo osalala komanso okhazikika kuti wafer isapindike kapena kupindika. Granite imapereka malo osalala omwe ndi olimba kwambiri komanso osapindika, zomwe zimapangitsa kuti ikhale chinthu chabwino kwambiri chogwiritsira ntchito ma wafer chucks.

3. Zida Zoyeretsera Makina a Mankhwala (CMP)

Zipangizo za CMP zimagwiritsidwa ntchito kupukuta ma wafer panthawi yopanga. Zipangizozi zimafuna nsanja yokhazikika yomwe imatha kupirira kugwedezeka ndi kutentha. Kulimba kwabwino kwambiri komanso kufalikira kochepa kwa granite kumapangitsa kuti ikhale chinthu choyenera kugwiritsa ntchito zida za CMP.

4. Zipangizo Zowunikira Ma Wafer

Zipangizo zowunikira ma wafer zimagwiritsidwa ntchito pofufuza ma wafer kuti aone ngati pali zolakwika kapena zolakwika. Zipangizozi zimafuna malo okhazikika komanso athyathyathya kuti zitsimikizire kuti miyeso yake ndi yolondola. Granite imapereka malo okhazikika komanso athyathyathya omwe sangagwere, zomwe zimapangitsa kuti ikhale chinthu choyenera kugwiritsa ntchito pazida zowunikira ma wafer.

Mapeto

Pomaliza, granite ndi chinthu chomwe chimagwiritsidwa ntchito kwambiri mumakampani opanga ma wafer chifukwa cha mphamvu zake zapadera zamakaniko komanso kulimba kwake. Amagwiritsidwa ntchito kwambiri popanga zida za metrology, ma wafer chucks, zida za CMP, ndi zida zowunikira ma wafer. Kuphatikiza kwapadera kwa zinthu kumapangitsa kuti ikhale chinthu choyenera kugwiritsa ntchito chomwe chimafuna kulondola kwambiri komanso kulondola. Ndi maubwino ake ambiri, granite ikadali chisankho chodziwika bwino cha zida zopangira ma wafer, ndipo kugwiritsa ntchito kwake kukupitilizabe kukula mtsogolo.