Masiku ano, chifukwa cha kukula mwachangu kwa makampani opanga ma semiconductor, kuyesa kwa IC, ngati njira yofunika kwambiri yotsimikizira magwiridwe antchito a ma chip, kulondola kwake ndi kukhazikika kwake zimakhudza mwachindunji kuchuluka kwa zokolola za ma chip komanso mpikisano wa makampaniwa. Pamene njira yopangira ma chip ikupitilira kupita patsogolo ku 3nm, 2nm ndi ma node apamwamba kwambiri, zofunikira za zigawo zazikulu mu zida zoyesera za IC zikukulirakulira. Maziko a granite, okhala ndi mawonekedwe awo apadera komanso zabwino zake, akhala "mnzawo wagolide" wofunikira kwambiri pazida zoyesera za IC. Kodi ndi mfundo ziti zaukadaulo zomwe zili kumbuyo kwa izi?
I. "Kulephera Kupirira" kwa Maziko Achikhalidwe
Pa nthawi yoyesera IC, zida ziyenera kuzindikira bwino momwe ma chip pini amagwirira ntchito, kulimba kwa chizindikiro, ndi zina zotero pa nanoscale. Komabe, maziko achitsulo akale (monga chitsulo chosungunuka ndi chitsulo) awonetsa mavuto ambiri pakugwiritsa ntchito.
Kumbali imodzi, kuchuluka kwa kutentha kwa zinthu zachitsulo kumakhala kwakukulu, nthawi zambiri kumapitirira 10×10⁻⁶/℃. Kutentha komwe kumachitika panthawi yogwiritsira ntchito zida zoyesera za IC kapena kusintha pang'ono kwa kutentha kwa mlengalenga kungayambitse kufalikira kwakukulu kwa kutentha ndi kupindika kwa maziko achitsulo. Mwachitsanzo, maziko achitsulo chopangidwa ndi chitsulo cha mita imodzi amatha kukula ndikuchepa mpaka 100μm kutentha kukasintha ndi 10℃. Kusintha kotereku ndikokwanira kusokoneza probe yoyesera ndi ma chip pini, zomwe zimapangitsa kuti pasakhale kulumikizana bwino ndikupangitsa kuti deta yoyesera isokonezeke.
Kumbali inayi, mphamvu ya damping ya maziko achitsulo ndi yoipa, zomwe zimapangitsa kuti zikhale zovuta kugwiritsa ntchito mphamvu ya kugwedezeka yomwe imapangidwa ndi kugwiritsa ntchito zidazo mwachangu. Pankhani yoyesa ma signal pafupipafupi, kusinthasintha kosalekeza kwa ma micro-oscillation kudzayambitsa phokoso lalikulu, zomwe zimapangitsa kuti kulakwitsa kwa kuyesa kwa signal kukhale kopitilira 30%. Kuphatikiza apo, zipangizo zachitsulo zimakhala ndi mphamvu ya maginito yambiri ndipo zimatha kulumikizana ndi ma electromagnetic signals a zida zoyesera, zomwe zimapangitsa kuti eddy current iwonongeke komanso zotsatira za hysteresis, zomwe zimasokoneza kulondola kwa miyeso yolondola.
II. "Mphamvu Yolimba" ya Maziko a Granite
Kukhazikika kwa kutentha, kuyika maziko a muyeso wolondola
Granite imapangidwa ndi kuphatikiza kolimba kwa makhiristo amchere monga quartz ndi feldspar kudzera mu ma ionic ndi covalent bonds. Coefficient yake ya expansion ya kutentha ndi yotsika kwambiri, ndi 0.6-5×10⁻⁶/℃ yokha, yomwe ndi pafupifupi 1/2-1/20 ya zinthu zachitsulo. Ngakhale kutentha kutasintha ndi 10℃, expansion ndi contraction ya granite base ya 1 mita yayitali ndi yochepera 50nm, pafupifupi kufika pa "zero deformation". Pakadali pano, thermal conductivity ya granite ndi 2-3 W/(m · K yokha), yomwe ndi yochepera 1/20 ya zitsulo. Imatha kuletsa bwino kutentha kwa zida, kusunga kutentha kwa pamwamba pa base uniform, ndikuwonetsetsa kuti test probe ndi chip nthawi zonse zimakhala ndi malo ogwirizana.
2. Kuletsa kugwedezeka kwamphamvu kwambiri kumapanga malo oyesera okhazikika
Zolakwika zapadera za kristalo ndi kapangidwe kake kotsetsereka mkati mwa granite kumapatsa mphamvu yotaya mphamvu, ndi chiŵerengero cha damping cha mpaka 0.3-0.5, chomwe ndi choposa kasanu ndi kamodzi kuposa maziko achitsulo. Deta yoyesera ikuwonetsa kuti pansi pa kugwedezeka kwa 100Hz, nthawi yochepetsera kugwedezeka kwa maziko a granite ndi masekondi 0.1 okha, pomwe maziko achitsulo chopangidwa ndi chitsulo ndi masekondi 0.8. Izi zikutanthauza kuti maziko a granite amatha kuletsa nthawi yomweyo kugwedezeka komwe kumachitika chifukwa cha kuyambitsa ndi kutseka kwa zida, kukhudzidwa kwakunja, ndi zina zotero, ndikuwongolera kugwedezeka kwa nsanja yoyesera mkati mwa ±1μm, kupereka chitsimikizo chokhazikika cha malo a nanoscale probes.
3. Kapangidwe kachilengedwe kotsutsana ndi maginito, kochotsa kusokoneza kwa maginito
Granite ndi chinthu cha diamagnetic chomwe chingathe kupirira mphamvu ya maginito ya pafupifupi -10 ⁻⁵. Ma electron amkati amapezeka awiriawiri mkati mwa ma bond a mankhwala ndipo sagawidwa ndi mphamvu ya maginito akunja. Mu malo amphamvu a maginito a 10mT, mphamvu ya maginito yomwe imabwera pamwamba pa granite ndi yochepera 0.001mT, pomwe pamwamba pa chitsulo chopangidwa ndi chitsulo ndi yokwera kuposa 8mT. Mphamvu yachilengedwe iyi yotsutsana ndi maginito imatha kupanga malo oyezera bwino zida zoyesera za IC, kuziteteza ku kusokonezedwa kwa maginito akunja monga ma workshop motors ndi ma RF signals. Ndi yoyenera kwambiri poyesa zochitika zomwe zimakhudzidwa kwambiri ndi phokoso la maginito, monga ma quantum chips ndi ma ADCs/Dacs olondola kwambiri.
Chachitatu, kugwiritsa ntchito kothandiza kwapeza zotsatira zabwino kwambiri
Machitidwe a makampani ambiri opanga ma semiconductor awonetsa bwino kufunika kwa maziko a granite. Kampani yodziwika bwino padziko lonse lapansi yoyesera zida za semiconductor itagwiritsa ntchito maziko a granite mu nsanja yake yapamwamba yoyesera ma chip a 5G, idapeza zotsatira zodabwitsa: kulondola kwa malo a khadi la probe kudakwera kuchoka pa ± 5μm kufika pa ± 1μm, kupotoka kwa deta yoyesera kudatsika ndi 70%, ndipo kuchuluka kwa kuweruza kolakwika kwa mayeso amodzi kudatsika kwambiri kuchokera pa 0.5% kufika pa 0.03%. Pakadali pano, mphamvu yoletsa kugwedezeka ndi yodabwitsa. Zipangizozi zimatha kuyambitsa mayeso osadikira kuti kugwedezeka kuwola, kufupikitsa nthawi yoyesera kamodzi ndi 20% ndikuwonjezera mphamvu yopangira pachaka ndi ma wafer oposa 3 miliyoni. Kuphatikiza apo, maziko a granite amakhala ndi moyo wazaka zoposa 10 ndipo safuna kukonzedwa pafupipafupi. Poyerekeza ndi maziko achitsulo, mtengo wake wonse umachepetsedwa ndi zoposa 50%.
Chachinayi, kusintha malinga ndi zomwe zikuchitika m'mafakitale ndikutsogolera kukweza ukadaulo woyesera
Ndi chitukuko cha ukadaulo wapamwamba wopaka (monga Chiplet) komanso kukwera kwa minda yatsopano monga ma chips a quantum computing, zofunikira pakugwira ntchito kwa chipangizo poyesa IC zipitilira kukwera. Maziko a granite akupitilizabe kupanga zatsopano ndikusintha. Kudzera mu chithandizo cha pamwamba kuti awonjezere kukana kuwonongeka kapena kuphatikiza ndi ma piezoelectric ceramics kuti akwaniritse kugwedezeka kogwira ntchito komanso kupita patsogolo kwina kwaukadaulo, akupita ku njira yolondola komanso yanzeru. M'tsogolomu, maziko a granite apitiliza kuteteza luso laukadaulo la makampani opanga ma semiconductor komanso chitukuko chapamwamba cha "ma chips aku China" ndi magwiridwe ake abwino kwambiri.
Kusankha maziko a granite kumatanthauza kusankha njira yolondola, yokhazikika komanso yothandiza yoyesera IC. Kaya ndi kuyesa kwapamwamba kwa chip kapena kufufuza mtsogolo kwa ukadaulo wamakono, maziko a granite adzakhala ndi gawo lofunika kwambiri komanso losasinthika.
Nthawi yotumizira: Meyi-15-2025