Chifukwa Chake Opanga Zipangizo za Semiconductor Amatchula Maziko a Granite Achilengedwe - Zifukwa 5 Zofunikira

Mu dziko lofunika kwambiri popanga zinthu za semiconductor, komwe kukula kwa zinthu kumayesedwa mu nanometers, maziko a makinawo ndi ofunikira kwambiri monga ma optics kapena vacuum system. Kaya ndi makina owunikira ma wafer kapena makina ojambulira a deep-ultraviolet (DUV), makampani opanga zinthu padziko lonse lapansi nthawi zonse amasankha granite wakuda wachilengedwe kuti apange maziko awo.

Koma n’chifukwa chiyani miyala yachilengedwe ndi muyezo wagolide m’makampani omwe amafotokozedwa ndi zipangizo zamakono zopangira zinthu? Nazi zifukwa zisanu zaukadaulo zomwe granite yachilengedwe ndi chisankho chosakambidwa pa zipangizo za semiconductor.

1. Kukhazikika Kwambiri kwa Kutentha mu Fab

Malo a semiconductor "Front-End" amafunika kusinthasintha kotheratu. Ngakhale gawo laling'ono la digiri pakusintha kwa kutentha lingayambitse kukula kwa zomangamanga zachitsulo, zomwe zimapangitsa kuti zolakwika zophimba kapena "kusawoneka bwino" mu lithography.

Granite yachilengedwe ili ndi Coefficient of Thermal Expansion (CTE) yotsika kwambiri. Poyerekezamaziko a granitePa makina owunikira ma wafer kupita ku chitsulo kapena aluminiyamu, granite imakhalabe "yozizira" ngakhale kusintha pang'ono kwa chilengedwe. Kutentha kumeneku kumatsimikizira kuti njira yowunikira imakhala yolunjika kuyambira pa wafer yoyamba ya kusintha mpaka yomaliza.

2. Kuchepetsa Kugwedezeka Kwapadera kwa Nanometer Precision

Zipangizo za Lithography ndi zida zoyezera zinthu zapamwamba zimakhala ndi vuto lalikulu la "phokoso" - kugwedezeka kochokera pansi pa fakitale, mafani ozizira, kapena zogwirira ntchito za robotic wafer.

Ngakhale zitsulo nthawi zambiri "zimagwedezeka" (zimagwedezeka kwa nthawi yayitali pambuyo poti zagundana), granite yachilengedwe ili ndi mphamvu yayikulu yonyowetsa mkati. Imatenga ndikuchotsa mphamvu ya kinetic mwachangu. Granite iyi yonyowetsa kugwedezeka kwa zida za lithography imalola makinawo kukhazikika mwachangu pambuyo poti asuntha mofulumira kwambiri, zomwe zimawonjezera kwambiri mphamvu ya "Units Per Hour" (UPH) ya chidacho.

3. Yopanda Maginito komanso Yopanda Maginito

Njira za semiconductor nthawi zambiri zimakhala ndi ma electron beams omveka bwino (E-beam) kapena ma magnetic linear motors olondola kwambiri. Maziko achitsulo amatha kusokoneza maginito awa kapena kupanga ma eddy currents omwe amasokoneza kulondola kwa sensa.

Monga chotetezera chilengedwe, granite imapereka nsanja yoyezera zinthu yopanda maginito ya zipinda zoyera. Sizimasokoneza malo amagetsi a chipangizocho, zomwe zimathandiza kuti deta ikhale yoyera, yosawonongeka panthawi yojambula mapu a malo a wafer kapena kuyang'ana zolakwika.

4. Kukana dzimbiri ndi kugwirizana ndi malo oyeretsera

Mu chipinda choyeretsa (Kalasi 1 kapena Kalasi 10), kutulutsa mpweya ndi kupanga tinthu tating'onoting'ono ndi adani a kukolola. Mosiyana ndi chitsulo chopangidwa ndi chitsulo kapena chitsulo, granite yachilengedwe siichita dzimbiri, siipitsa okosijeni, kapena imafuna utoto wa mankhwala ndi zokutira zomwe zingaphulike kapena kuzimitsa mpweya pakapita nthawi.

Granite ndi yopanda mankhwala. Ngakhale ikagwiritsidwa ntchito ndi zinthu zapadera zoyeretsera zomwe zimagwiritsidwa ntchito mu semiconductor fab, imasunga mawonekedwe ake abwino. Kapangidwe kake kamphamvu kwambiri (pafupifupi 3100kg/m³) kamaonetsetsa kuti imakhalabe "yopanda tinthu" nthawi yonse ya moyo wa chipangizocho.

5. Kupeza "Kukhazikika Koona" kudzera mu Kugwirana ndi Manja

Mu makampani opanga zinthu za semiconductor, "flat" si yosalala mokwanira. Zigawo nthawi zambiri zimafuna kulondola kwa nano-level komwe makina a CNC sangathe kukwaniritsa.

Granite wachilengedwe amalola kulumikiza ndi manja, njira yokonzanso ndi manja komwe akatswiri aluso amakwanitsa kupirira kusalala kolimba ngati ± 0.001mm. Kulondola kumeneku ndikofunikira kwambiri pamagawo okhala ndi mpweya omwe amagwiritsidwa ntchito mu ma wafer scanner amakono, komwe kusiyana kwa mpweya pakati pa siteji ndi maziko kuyenera kukhala kofanana bwino pa ulendo wonse.

Ubwino wa ZHHIMG: Kulondola kwa Nano-Age

Ku UNPARALLELED (ZHHIMG), timamvetsetsa bwino kutentha kwa granite mu zinthu zopangidwa ndi semiconductor kuposa wina aliyense. Timapereka zida zopangidwa ndi granite zopangidwa ndi akatswiri opanga zida za semiconductor padziko lonse lapansi, omwe ndi akatswiri pa:

• Maziko akuluakulu kwambiri ogwirizana ndi vacuum.

• Matabwa olondola a makina oyendera magalimoto othamanga kwambiri.

• Zoyika zolumikizidwa kuti zikhazikike pa injini yolunjika.

Granite yathu yakuda yolemera kwambiri imapezedwa ndikukonzedwa kuti ikwaniritse zofunikira kwambiri za pulani yapadziko lonse ya semiconductor.