Machitidwe oyenda bwino kwambiri ndi ofunikira kwambiri pakupanga zinthu zamakono zamakono, makamaka pa semiconductor lithography, wafer inspection, optical alignment, ndi nanometer-scale metrology. Pakati pa machitidwewa pali vuto lalikulu la uinjiniya: kukwaniritsa kuyenda kosalala, kosagwedezeka, komanso kobwerezabwereza popanda cholakwika chokhudzana ndi makina.

Ukadaulo wonyamula mpweya, ukaphatikizidwa ndi kukhazikika kwakukulunyumba za granite, imapereka njira imodzi yabwino kwambiri yothetsera vutoli. Dongosolo lonyamula mpweya wa granite limalowa m'malo mwa makina akale ogudubuza kapena otsetsereka ndi mpweya wochepa wopanikizika, zomwe zimathandiza kuti mpweyawo usamayende bwino komanso kuti ukhale wolondola kwambiri.

M'malo opangira zinthu zapamwamba, makampani monga ZHHIMG amaphatikiza maziko a granite okhala ndi mphamvu zambiri ndi zida zoyendetsera mpweya zokonzedwa bwino kuti akwaniritse machitidwe oyenda omwe amatha kulamulira malo ang'onoang'ono komanso ngakhale a nanometer.

1. Mfundo Yofunika Kwambiri ya Ukadaulo Wonyamula Mpweya

Ma bearing a mpweya amagwira ntchito motsatira mfundo yolekanitsa mphamvu ya madzi. M'malo molola malo awiri olimba kuti agwirizane, mpweya wolamulidwa wopanikizika umayikidwa pakati pawo.

1.1 Kupanga Filimu ya Mpweya

Dongosolo lodziwika bwino lonyamula mpweya limakhala ndi:

• Maziko a granite osasuntha
• Galimoto yoyenda kapena siteji
• Ma nozzle a mpweya wabwino kapena malo olumikizirana ndi mapovu
• Dongosolo loyendetsa mpweya woyendetsedwa

Mpweya wopanikizika umalowetsedwa kudzera m'magawo ang'onoang'ono kapena zinthu zadothi zokhala ndi mabowo, zomwe zimapangitsa kuti ukhale wopyapyala, womwe nthawi zambiri umakhala ndi makulidwe a ma micrometer awiri mpaka makumi awiri.

Filimu ya mpweya iyi imathandizira katunduyo ndipo imachotsa kukhudzana mwachindunji ndi makina.

1.2 Makina Olumikizirana Osagwira Ntchito

Mosiyana ndi ma bearing a mpira kapena malangizo olunjika, ma bearing a mpweya amagwira ntchito mu dongosolo lomwe:

• Coefficient ya kukangana ikuyandikira zero
• Kuvala kumachotsedwa mwachiphunzitso
• Kuyenda kwa ndodo sikungatheke

Izi zimapangitsa kuti ma bearing a mpweya akhale abwino kwambiri pamachitidwe okhazikika bwino kwambiri pomwe hysteresis yamakina siivomerezeka.

1.3 Khalidwe la Kuyenda kwa Laminar

Kugwira ntchito kwa ma bearing a mpweya kumadalira kwambiri kukhazikika kwa kayendedwe ka laminar.

• Kusinthasintha kwa kuthamanga kwa magazi
• Kusakhazikika kwa malo
• Kuwonjezeka kwa phokoso m'makina oyezera

Chifukwa chake, kapangidwe ka mpweya wolondola kamafunika kukonza bwino mphamvu zamadzimadzi (CFD) kuti zitsimikizire kufalikira kokhazikika kwa madzi pamwamba pa mpweya.

2. Udindo wa Granite mu Air Bearing Systems

Granite si chinthu chothandizira kapangidwe kake kokha; ndi gawo logwira ntchito la kayendedwe ka zinthu.

2.1 Kukhazikika kwa Kapangidwe

Granite wakuda wokhala ndi kachulukidwe kakakulu umapereka:

• Modulus yapamwamba ya kukhazikika kwa elasticity
• Umphumphu wa nthawi yayitali
• Kukana kusintha kwa katundu

Makhalidwe amenewa ndi ofunikira chifukwa ma bearing a mpweya amadalira kusunga kutalika kofanana kwa mpata pamwamba pa ulendo wonse.

2.2 Kukhazikika kwa Kutentha ndi Kuwongolera Kuthamanga

Kutentha kwa mpweya ndi chimodzi mwa zinthu zomwe zimayambitsa zolakwika zambiri mu kayendedwe kolondola.

Granite ili ndi zinthu zotsatirazi:

• Kuchuluka kwa kutentha kochepa (~4–7 × 10⁻⁶ /°C)
• Kutentha kwambiri
• Kufalikira pang'onopang'ono kwa kutentha

Izi zimachepetsa:

• Kupendekeka kwa siteji chifukwa cha kutentha kosagwirizana
• Kusuntha kwa Z-axis mu miyeso yayitali
• Zolakwika pakugwirizanitsa machitidwe a kuwala

2.3 Kuchepetsa Kugwedezeka

Kuchepetsa kwachilengedwe kwa Granite kumachepetsa kufalikira kwa kugwedezeka kwamphamvu kuchokera kuzinthu zakunja monga:

• Kugwedezeka kwa pansi
• Zipangizo zomangira zapafupi
• Machitidwe oyendetsera mpweya

Izi ndizofunikira kwambiri kuti malo azikhala okhazikika pakugwiritsa ntchito nanometer-scale.

3. Kapangidwe ka Mapulatifomu Opangira Mpweya a Granite

Dongosolo lodziwika bwino la granite air bearing system limaphatikiza makina, pneumatic, ndi control subsystems.

3.1 Kapangidwe ka Makina

Zigawo zazikulu:

• Nsanja yoyambira ya granite
• Njanji zoyenda bwino kwambiri
• Mapepala onyamula mpweya (okhala ndi ma ceramic kapena ma orifice)
• Msonkhano wosuntha wa siteji

Kusalala kwa maziko a granite nthawi zambiri kumayendetsedwa ndi milingo ya micron kapena sub-micron kutengera kalasi yogwiritsira ntchito.

3.2 Dongosolo Lolamulira Ma Pneumatic

Dongosolo loperekera mpweya limaphatikizapo:

• Chokometsera mpweya champhamvu
• Owongolera molondola
• Zoletsa kuyenda kwa madzi
• Magawo osefera (kuchotsa mafuta, chinyezi, tinthu tating'onoting'ono)

Ngakhale kuipitsidwa pang'ono kungakhudze kwambiri kukhazikika kwa mabere.

3.3 Machitidwe Obwezera ndi Kuwongolera

Machitidwe apamwamba amaphatikizana:

• Ma interferometer a laser
• Ma encoder olunjika
• Masensa othamangitsidwa ndi capacitive

Machitidwewa amalola kuwongolera mayendedwe otsekedwa okhala ndi mawonekedwe a nanometer-scale.

4. Metrology ndi Kugwira Ntchito Molondola

Machitidwe oyendera mpweya amawunikidwa kutengera magawo angapo ofunikira a metrology.

4.1 Kuwongoka ndi Kusalala

Zolakwika zowongoka nthawi zambiri zimachitika chifukwa cha:

• Kupatuka kwa maziko a granite
• Kusintha kwa makulidwe a filimu ya mpweya
• Kusalinganika kwa kugawa katundu

Machitidwe apamwamba kwambiri amatha kukwaniritsa izi:

• Kuwongoka kwa sub-micron pakuyenda kwa mita
• Kubwerezabwereza kwa nanometer m'malo olamulidwa

4.2 Kulondola kwa Malo

Kulondola kwa malo kumadalira:

• Kusintha kwa encoder
• Kukhazikika kwa kuzungulira kolamulira
• Kuuma kwa filimu ya mpweya

Mosiyana ndi makina opangidwa ndi makina, maberiya a mpweya amachotsa kuukira konse.

4.3 Kulimba Kwamphamvu

Kuuma kwa mphamvu kumatanthauza momwe dongosolo limayankhira ku mphamvu zakunja.

Chiwonetsero cha maberiyani a mpweya:

• Kuuma kwakukulu pamafupipafupi otsika
• Kuchepa kwa kuuma pa ma frequency apamwamba chifukwa cha kupsinjika kwa mpweya

Kusinthana kumeneku kumayendetsedwa kudzera mu kapangidwe ka makina ndi kukonza bwino ntchito yoyika zinthu pasadakhale.

5. Ntchito Zamakampani

Makina onyamula mpweya wa granite amagwiritsidwa ntchito kwambiri m'magawo opanga zinthu apamwamba.

5.1 Makampani Opanga Ma Semiconductor

Mapulogalamuwa akuphatikizapo:

• Magawo owunikira ma wafer
• Machitidwe olinganiza ma lithography
• Malo oika chigoba cha zithunzi

Machitidwewa amafunika kubwerezabwereza pamlingo wa nanometer.

5.2 Ma Precision Optics

Amagwiritsidwa ntchito mu:

• Machitidwe olinganiza ma lens
• Kuyika kwa kuwala kwa laser
• Makonzedwe a muyeso wa interferometric

5.3 Metrology Yogwirizana

Mapulatifomu a granite okhala ndi mpweya amagwiritsidwa ntchito mu:

• Makina apamwamba a CMM
• Makina oyezera owongolera owongolera
• Machitidwe owunikira masensa ambiri

5.4 Kupanga Zinthu Zapamwamba

Kuphatikizapo:

• Makina opangira makina ang'onoang'ono
• Mapulatifomu opangira laser a Femtosecond
• Makina owongolera opanga zowonjezera

6. Mavuto Okhudzana ndi Kuphatikiza Zinthu

Kupanga makina oyendera mpweya wa granite kumafuna kusinthana kwa mainjiniya angapo.

6.1 Zofunikira pa Kusalala kwa Malo

Ma bearing a mpweya amafunika kufalikira kwa mpweya kofanana kwambiri. Kupatuka kulikonse kwa granite kumakhudza mwachindunji:

• Kugawa katundu
• Kuyenda bwino
• Kulondola kwa malo

6.2 Kuzindikira Mpweya

Kugwira ntchito kwa dongosolo kumakhudzidwa ndi:

• Kukhazikika kwa kuthamanga
• Kufanana kwa kayendedwe ka madzi
• Magawo odetsa

Ngakhale tinthu tating'onoting'ono ta micron tingasokoneze kayendedwe ka mpweya.

6.3 Kulumikizana kwa Matenthedwe ndi Makina

Kukula kwa kutentha kwa granite ndi zigawo za kapangidwe kake kuyenera kugwirizanitsidwa mosamala kuti kupewe:

• Kupendekeka kwa siteji
• Kusuntha kwa Z-axis
• Kupotoza kwa mawonekedwe

7. Njira Zopangira ndi Kukonza

Makina oyendetsera mpweya wa granite olondola kwambiri amafunika malo opangira zinthu olamulidwa bwino.

Magawo odziwika bwino a ndondomekoyi ndi awa:

1. Makina okhwima a granite
2. Mayendedwe okhazikika a kutentha
3. Kupera ndi kupalasa mozama
4. Kuphatikiza kwa mpweya
5. Kutsimikizira kwa Metrology
6. Kulinganiza kwa laser

Opanga apamwamba monga ZHHIMG amagwiritsa ntchito malo olamulidwa ndi kutentha kokhazikika nthawi zambiri mkati mwa ±1°C kuti atsimikizire kulondola kwa geometry komwe kungabwerezedwe.

8. Ubwino Woposa Machitidwe Opangira Magalimoto

Ma bearing a mpweya amachotsa zoletsa zambiri zazikulu za makina.

Mapeto

Makina onyamula mpweya wa granite ndi amodzi mwa njira zamakono kwambiri zowongolera mayendedwe molondola kwambiri popanga zinthu zamakono. Mwa kuphatikiza kukhazikika kwa kapangidwe ka granite yokhala ndi kuchuluka kwakukulu ndi mawonekedwe osakanizika a kulekanitsa filimu ya mpweya, makinawa amakwaniritsa kulondola kwapadera, kubwerezabwereza, komanso kukhazikika kwa nthawi yayitali.

Pamene makampani opanga ma semiconductor ndi mainjiniya olondola akupitilizabe kupititsa patsogolo ma nanometer komanso ma sub-nanometer tolerances, ma granite air bearing platforms adzakhalabe ukadaulo wofunikira kwambiri pakupanga ndi kupanga zinthu za m'badwo wotsatira.