Momwe Zomangamanga za Malo Zimanenera Kulondola kwa Jiometri mu Micro-Machining

Kupanga zinthu zomangidwa bwino kwambiri kumafuna zambiri kuposa makina apamwamba a CNC. Popanda kudzipatula kwathunthu ku kugwedezeka kwa nthaka ndi mafakitale, kukwaniritsa kulekerera kwa sub-micron geometric sikungatheke. Galimoto iliyonse yodutsa, crane yapafupi, ndi compressor yowongolera nyengo imayambitsa mafunde a micro-seismic omwe angawononge kugwedezeka ndi kulinganizidwa kwa maziko a granite olondola, ma bearing a mpweya, ndi zinthu zadothi.

Pofuna kuchepetsa vutoli, mafakitale ayenera kuona malo opangira zinthu ngati gawo logwirizana la dongosolo la metrology.

Fiziki ya Kukhazikika kwa Maziko

Pansi pa konkire wamba wa mafakitale nthawi zambiri amakhala ndi makulidwe a 150 mm mpaka 300 mm. Ngakhale kuti ndi okwanira kugwiritsa ntchito zinthu wamba komanso kuyika zinthu zambiri, sakwanira kupanga zinthu za nanometer. Pansi pa mphamvu, pansi wamba umagwira ntchito ngati diaphragm, zomwe zimapangitsa kuti pansi pazigwedezeke pang'onopang'ono m'zipinda zogwirira ntchito.

 

Pofuna kuthetsa vutoli, malo opangira zinthu zapamwamba amagwiritsa ntchito njira yopangira zinthu zosiyanasiyana:

1. Maziko Olimba Kwambiri a Gulu Lankhondo: Kuthira konkire wolimbikitsidwa mpaka kuzama pang'ono kwa 1000 mm kumapereka chipika chachikulu cha inertial. Unyinji uwu umanyowetsa mafunde otsika (1 - 10 Hz) asanafike pamakina.

2. Ma ngalande Odzipatula Ozungulira: Kudula ngalande zapadera zodzipatula kuzungulira madera opangira zinthu—zokhala ndi miyeso yeniyeni monga m'lifupi mwa 500 mm ndi kuya kwa 2000 mm—kumachotsa malo opangira zinthu molondola kuchokera ku malo ena onse opangira zinthu. Ngalandezi zimadzazidwa ndi zipangizo zapadera zoyamwa mphamvu kuti zichepetse mafunde a shockwave.

3. Kuletsa Kulankhula ndi Makina: Ma cranes ndi ma gantry hoists ndi gwero lalikulu la phokoso lochepa komanso kugwedezeka kwa kapangidwe kake. Kugwiritsa ntchito njira zoyendera pamwamba zomwe zimatetezedwa ndi mawu, zomwe zimayendetsedwa chete, kumateteza mafunde amphamvu kuti asasokoneze ma electron volts ndi ma laser interferometers panthawi yoyezera.

Kugwirizanitsa Zachilengedwe: Kutentha ndi Chinyezi

Kukula kwa kutentha ndiye chinthu chachikulu chomwe chimayambitsa zolakwika za geometric mugranite yolondolandi kupanga zinthu zadothi. Kusintha kwa kutentha kwa 0.5 ℃ kokha kungapangitse kuti bedi la granite la 5000 mm lisunthe kupitirira malire oyenera.

Kuti zinthu ziyende bwino nthawi zonse, malo ogwirira ntchito ndi kusonkhanitsa zinthu ayenera kutsatira malamulo okhwima:

• Malo Otetezedwa ndi Zachilengedwe: Kupanga kuyenera kuchitika m'zipinda zoyera zazikulu, zotsekedwa (monga 10,000㎡) komwe kutentha kumakhala kotsekedwa pa 20℃ ± 0.2℃ ndipo chinyezi chimakhala cholamulidwa bwino.

• Kuwongolera Kuthamanga kwa Mpweya: Machitidwe oyendera mpweya wa Laminar ayenera kupangidwa kuti apewe mpweya wothamanga kwambiri pamwamba pa granite, kuletsa kutentha komwe kumachitika m'malo ena.

• Kuyerekezera kwa Semiconductor Cleanroom: Kusonkhanitsa komaliza kwa ma multi-axis granite gantries, linear motor stages, ndi ultra-precision air bearing kumafuna malo apadera, opanda fumbi omwe amafanana ndi semiconductor fab ya wogwiritsa ntchito. Izi zimatsimikizira kuti palibe kuipitsidwa kwa tinthu tating'onoting'ono komwe kumasokoneza mipata yonyamula mpweya, yomwe nthawi zambiri imakhala pakati pa 5μm ndi 15μm.

Chidule

Kupanga zinthu molondola kwambiri sikungakhalepo m'malo okhazikika a mafakitale. Kukhazikika kwa pansi pa fakitale, kulekanitsidwa kwa maziko, ndi kuwongolera kwathunthu kwa thermodynamics ya chipinda choyera ndizomwe zimapangitsa kuti pakhale mphamvu ya metrological. Kuyika ndalama mu maziko akuluakulu a inertial ndi kulekanitsidwa kwa perimeter ndiyo njira yokhayo yotsimikizika yowonetsetsa kuti kupanga zinthu zazing'onoting'ono kumakhalabe kokhazikika, kobwerezabwereza, komanso kotsatirika.